Method for manufacturing semiconductor device and semiconductor device
View Patent ↗A first oxide film and a second oxide film 16 are formed in a first region 13 a and a second region 13 b , respectively, on the surface of the semiconductor substrate 10 , via thermal oxidization method, and the first oxide film is removed while the second oxide film 16 is covered with the resist layer 18 formed thereon, and then the resist layer 18 is removed with a chemical solution containing an organic solvent such as isopropyl alcohol as a main component. Subsequently, a third oxide film 22 having different thickness than the second oxide film 16 is formed in the first region 13 a.
1. A method for manufacturing a semiconductor device, comprising the steps of:
forming an insulating film on a semiconductor substrate;
forming a conductive film on the insulating film;
forming a patterned protective film having a predetermined geometry on the conductive film;
selectively removing the conductive film utilizing the protective film as a mask;
selectively removing the insulating film to partially expose the surface of the semiconductor substrate by removing the protective film before partially exposing the surface of the semiconductor substrate; and
after the above steps, wet-processing the surface of a semiconductor substrate with a chemical solution containing an organic solvent as a main component, wherein at least a part of the semiconductor substrate is exposed while the chemical solution is processed thereon.
2. A method for manufacturing a semiconductor device, comprising the steps of:
on a semiconductor substrate, forming a high-k insulating film composed of a material having higher dielectric constant than that of silicon oxide;
forming a conductive film on the insulating film;
forming a patterned protective film having a predetermined geometry on the conductive film;
selectively removing the conductive film utilizing the protective film as a mask;
selectively removing the insulating film to partially expose the surface of the semiconductor substrate by selectively removing a part of the high-k insulating film via a dry etching utilizing the protective film as a mask;
after the above steps, wet-processing the surface of a semiconductor substrate with a chemical solution containing an organic solvent as a main component, wherein at least a part of the semiconductor substrate is exposed while the chemical solution is processed thereon;
removing the protective film; and
selectively removing the remained part of the high-k insulating film via a wet etching utilizing the conductive film as a mask to partially expose the surface of the semiconductor substrate, the wet etching being carried out by using a removing solution containing an organic solvent as a main component and a fluoride-containing compound, a removing solution containing hot phosphoric acid or a removing solution containing sulfuric acid.
3. The method of claim 1 , wherein the organic solvent is a solvent having a polar group.
4. The method of claim 1 , wherein the organic solvent is selected from the group consisting of: isopropyl alcohol; ethylene glycol; 2-heptanone; cyclopentanone; methylethyl ketone; glycol ether; propyleneglycol monomethyl ether; and propyleneglycol monomethyl acetate.
5. The method of claim 1 , wherein the organic solvent is isopropyl alcohol, and the chemical solution contains not less than 90% vol. of isopropyl alcohol.
6. The method of claim 1 , wherein the insulating film comprises at least a high-k insulating film that has higher dielectric constant than that of silicon oxide and wherein the step of selectively removing the insulating film by wet etching with a chemical solution containing an oxidizing acid or a salt thereof to partially expose the surface of the semiconductor substrate.
7. The method of claim 6 , wherein the oxidizing acid or the salt thereof contains one or more compounds selected from the group consisting of: phosphoric acid; sulfuric acid; nitric acid; perchloric acid; permanganic acid; and salts thereof; and cerium ammonium nitrate.
8. The method of claim 6 , wherein the step of removing the insulating film is carried out at a chemical solution temperature of 40° C. to 200° C.
9. A method for manufacturing a semiconductor device, comprising:
forming an insulating film on a semiconductor substrate, said insulating film comprising at least a high-k insulating film that has a higher dielectric constant than that of the silicon oxide film;
selectively removing said insulting film via a wet etching with a chemical solution containing an organic solvent as a main component to partially expose said surface of said semiconductor substrate;
before said selectively removing said insulating film via a wet etching, forming a patterned protective film having a predetermined geometry on said insulating film; and
selectively removing a part of said high-k insulating film via a dry etching utilizing said protective film as a mask.
10. The method according to claim 9 , wherein said organic solvent is a solvent having polar group.
11. The method according to claim 9 , wherein said organic solvent is selected from the group consisting of:
isopropyl alcohol; ethylene glycol; 2-heptanone; cyclopentanone; methylethyl ketone; glycol ether; propyleneglycol monomethyl ether; and propyleneglycol monomethyl acetate.
12. The method according to claim 9 , wherein said organic solvent is isopropyl alcohol, and said chemical solution contains not less than 90% vol. of isopropyl alcohol.
13. The method according to claim 9 , wherein in said selectively removing a part of said high-k insulating film via a dry etching, said dry etching is continued to half an entire thickness of said high-k insulating film.