Nitride-based compound semiconductor light emitting device and method of fabricating the same
View Patent ↗A nitride-based semiconductor light emitting device with improved characteristics of ohmic contact to an n-electrode and a method of fabricating the same are provided. The nitride-based semiconductor light emitting device includes an n-electrode, a p-electrode, an n-type compound semiconductor layer, and an active layer and a p-type compound semiconductor layer formed between the n- and p-electrodes. The n-electrode includes: a first electrode layer formed of at least one element selected from the group consisting of Pd, Pt, Ni, Co, Rh, Ir, Fe, Ru, Os, Cu, Ag, and Au; and a second electrode layer formed on the first electrode layer using a conductive material containing at least one element selected from the group consisting of Ti, V, Cr, Zr, Nb, Hf, Ta, Mo, W, Re, Ir, Al, In, Pb, Ni, Rh, Ru, Os, and Au.
1. A nitride-based compound semiconductor light emitting device including:
an n-electrode,
a p-electrode, and
an n-type compound semiconductor layer, an active layer and a p-type compound semiconductor layer respectively formed between the n-electrode and the p-electrode,
wherein the n-electrode comprises:
a first electrode layer formed of at least one element selected from the group consisting of Ir, Fe, Ru, and Os, and
a second electrode layer formed on the first electrode layer using a conductive material containing at least one element selected from the group consisting of V, Nb, Hf, Re, and Pb,
wherein the first electrode layer of the n-electrode directly or indirectly contacts the n-type compound semiconductor layer and the first electrode layer is disposed between the second electrode layer and the n-type compound semiconductor layer,
wherein the n-electrode is disposed closer to the n-type compound semiconductor layer than the p-type compound semiconductor layer, and
wherein the first electrode layer and the second electrode layer are sequentially stacked on the n-type compound semiconductor layer.
2. The device of claim 1 , wherein the n-electrode is annealed in a temperature range of approximately 200° C. to 900° C.
3. The device of claim 1 , wherein the active layer, the p-type compound semiconductor, and the p-electrode are sequentially formed on a first surface of the n-type compound semiconductor layer, and
wherein the n-electrode is formed on a second surface of the n-type compound semiconductor layer.
4. The device of claim 3 , wherein the n-type compound semiconductor layer is an n-GaN layer.
5. The device of claim 4 , wherein the second surface of the n-GaN layer is a Ga-polar surface, N-polar surface, or non-polar surface.
6. The device of claim 1 , further comprising a GaN substrate,
wherein the n-type compound semiconductor layer, the active layer, the p-type compound semiconductor layer, and the p-electrode are sequentially formed on a first surface of the GaN substrate, and the n-electrode is directly formed on a second surface of the GaN substrate, the second surface being opposite to the first surface.
7. The device of claim 6 , wherein the second surface of the GaN substrate is a Ga-polar surface, N-polar surface, or non-polar surface.
8. The device of claim 1 , further comprising a sapphire substrate,
wherein the n-type compound semiconductor layer, the active layer, the p-type compound semiconductor layer, and the p-electrode are sequentially formed on the sapphire substrate, and
wherein the n-type compound semiconductor layer has a stepped surface and the n-electrode is formed on the stepped surface.
9. The device of claim 8 , wherein the n-type compound semiconductor layer is an n-GaN layer.
10. The device of claim 9 , wherein the stepped surface of the n-GaN layer is a Ga-polar surface, an N-polar surface, or a non-polar surface.
11. The device of claim 1 , wherein the first electrode layer is formed to a thickness of approximately 1 to 1,000 Å.
12. The device of claim 1 , wherein the p-type compound semiconductor layer includes a p-GaN layer.
13. A nitride-based compound semiconductor light emitting device comprising:
an n-electrode;
a p-electrode; and
an n-type compound semiconductor layer, an active layer and a p-type compound semiconductor layer respectively formed between the n-electrode and the p-electrode,
wherein the n-electrode comprises:
a first electrode layer formed of at least one element selected from the group consisting of Co, Rh, Ir, Fe, Ru, Os, Cu, and Ag, and
a second electrode layer formed on the first electrode layer using a conductive material containing at least one element selected from the group consisting of Re and Pb,
wherein the first electrode layer of the n-electrode directly or indirectly contacts the n-type compound semiconductor layer and the first electrode layer is disposed between the second electrode layer and the n-type compound semiconductor layer,
wherein the n-electrode is disposed closer to the n-type compound semiconductor layer than the p-type compound semiconductor layer, and
wherein the first electrode layer and the second electrode layer are sequentially stacked on the n-type compound semiconductor layer.
14. The device of claim 13 , wherein the n-electrode is an annealed element which is annealed in a temperature range of approximately 200° C. to 600° C.