Method for manufacturing nitride-based semiconductor device
View Patent ↗In a method for manufacturing a high-quality GaN-based semiconductor layer on a substrate of different material, an AlN nucleation layer is grown on a substrate, a GaN buffer layer is grown on the AlN nucleation layer, and the substrate annealed. The AlN nucleation layer is formed to have a thickness greater than a critical radius of a nucleus of AlN crystal and less than a critical resilient thickness of AlN, and the GaN buffer layer is formed to have a thickness greater than a critical radius of a nucleus of GaN crystal and less than a critical resilient thickness of GaN. Annealing time is greater than L 2 /D Ga where L indicates a diffusion distance of Ga, and D Ga indicates a diffusion coefficient of Ga in the AlN nucleation layer.
1. A method for manufacturing a nitride-based semiconductor device, comprising steps of:
growing an AlN nucleation layer on a substrate by hydride vapor phase epitaxy (HVPE);
growing a GaN buffer layer on the AlN nucleation layer by HVPE; and
annealing the GaN buffer layer for a period of an annealing time,
wherein the AlN nucleation layer is formed to have a thickness greater than a critical radius of a nucleus of AlN crystal and less than a critical resilient thickness of AlN, the GaN buffer layer is formed to have a thickness greater than a critical radius of a nucleus of GaN crystal and less than a critical resilient thickness of GaN, and the annealing time is greater than L 2 /D Ga where L indicates a diffusion distance of Ga, and D Ga indicates a diffusion coefficient of Ga in the AlN nucleation layer.
2. The method as set forth in claim 1 , wherein the step of growing the AlN nucleation layer and the step of growing the GaN buffer layer are performed in-situ by HVPE.
3. The method as set forth in claim 1 , wherein the substrate comprises a material selected from the group consisting of sapphire, silicon carbide, silicon, zinc oxide, boron nitride, lithium aluminate, lithium niobate, germanium, aluminum nitride, and lithium gallate.
4. The method as set forth in claim 1 , wherein the AlN nucleation layer is grown at a temperature of 800° C.˜1,200° C. by HVPE.
5. The method as set forth in claim 1 , wherein the AlN nucleation layer is grown at a temperature of 1,000° C.˜1,100° C. by HVPE.
6. The method as set forth in claim 1 , wherein the GaN buffer layer is grown at a temperature of 500° C.˜700° C. by HVPE.
7. The method as set forth in claim 1 , wherein the GaN buffer layer is grown at a temperature of 500° C.˜600° C. by HVPE.
8. The method as set forth in claim 1 , wherein annealing is performed at a temperature of 500° C.˜900° C. in a nitrogen (N 2 ) atmosphere.
9. The method as set forth in claim 1 , wherein annealing is performed at a temperature of 800° C.˜900° C. under nitrogen atmosphere.
10. The method as set forth in claim 1 , further comprising:
growing a GaN-based semiconductor layer after the step of annealing the substrate.
11. The method as set forth in claim 1 , wherein the method is applied to manufacturing of GaN-based semiconductor optical diodes.