Nanotube device structure and methods of fabrication

1. A method of making a nanotube switching element, comprising:

forming a first structure having at a first output electrode;

forming second structure having a second output electrode;

forming a conductive article having at least one nanotube, the article having first and second ends;

positioning said conductive article between said first and second structures such that the first structure clamps the first and second ends of the article to the second structure, and such that the first and second output electrodes are opposite each other with the article positioned therebetween;

providing at least one signal electrode in electrical communication with the conductive article; and

providing at least one control electrode in spaced relation to the conductive article such that the control electrode may control the conductive article to form a conductive pathway between the signal electrode and the first output electrode.

2. The method of claim 1 , wherein the spaced relation provides a switching region in which a central portion of the conductive article electromechanically deflects to contact the first output electrode, and the first and second ends of the conductive article are clamped.

3. The method of claim 2 , further comprising selecting the spaced relation such that the central portion of the conductive article may non-volatilely contact the first output electrode.

4. The method of claim 1 , further comprising selecting the spaced relation such that the central portion of the conductive article may volatilely contact the first output electrode.

5. The method of claim 1 , further comprising providing an insulating layer on the control electrode to prevent electrical contact between the conductive article and the control electrode.

6. The method of claim 1 , further comprising providing a second control electrode in relation to the conductive article such that the second control electrode may control the conductive article to unform a conductive pathway between the signal electrode and the first output electrode.

7. The method of claim 6 , further comprising applying an insulating layer on the second output electrode to prevent electrical contact between the conductive article and the second output electrode.

8. The method of claim 1 , further comprising forming a conductive path between the first and second output electrodes to maintain them at the same voltage.

9. The method of claim 1 , further comprising forming a third output electrode on the first structure and a fourth output electrode on the second structure.

10. The method of claim 1 , further comprising providing a sacrificial layer and later removing the sacrificial layer to define the spaced relation between the conductive article and the control electrode.

11. The method of claim 10 , wherein removing the sacrificial layer comprises etching through the conductive article.

12. The method of claim 1 , wherein forming the conductive article comprises forming a porous nonwoven fabric of nanotubes.

13. The method of claim 12 , wherein forming the conductive article further comprising lithographically patterning the porous nonwoven fabric of nanotubes and removing portions of the fabric of nanotubes.

14. The method of claim 12 , wherein forming a porous nonwoven fabric of nanotubes comprises spin-coating a nanotube film.