Light-emitting device and method of manufacturing the same
View Patent ↗Provided is a light-emitting device and a method of manufacturing the same. The light-emitting device includes a substrate having at least one protruded portion with a curved surface in which a consistent defect density and uniform stress distribution can be obtained even when the growth of the semiconductor crystal layer and the forming of the light-emitting device are completed. In addition, the light-emitting device has a high the light extraction efficiency for extracting light generated at an electroluminescense layer externally.
1. A method of manufacturing a light-emitting device, comprising:
forming at least one protruded portion with a curved surface on a planarized substrate; and
forming a first semiconductor crystal layer on the substrate to cover the surface of the protruded portions and planarizing said first semiconductor crystal layer; and
sequentially forming an active layer and a second semiconductor crystal layer on the first semiconductor crystal layer,
wherein the crystal surface orientations of the at least one protruded portion except the vertex thereof are different from growth directions of the semiconductor crystal layers; and
the step of forming the first semiconductor crystal layer is performed so that a first growth rate of the first semiconductor crystal layer on the substrate surface between the protruded portions is higher than a second growth rate of the first semiconductor crystal layer on the surface of the protruded portions such that the majority of the growth of the first semiconductor crystal layer occurs on the substrate surface between the protruded portions.
2. The method of claim 1 further comprising, before the forming the at least one protruded portion:
patterning a photo resist formed on the substrate;
hard baking the photo resist and the substrate; and
etching the surface of the substrate, thereby forming at least one protruded portion.
3. The method of claim 2 , wherein, when etching the substrate surface, an etching gas is a Cl gas selected from the group consisting of Cl 2 , BCl 3 , HCl, CCl 4 , and SiCl 4 .
4. A method of manufacturing a light-emitting device, comprising:
forming a plurality of protruded portions with curved surfaces on a substrate;
growing a first group III nitride compound semiconductor crystal layer from the substrate surface between the protruded portions until the surface of the protruded portions is covered and the first group III nitride compound semiconductor crystal layer has a planar upper surface; and
sequentially growing an active layer and a second group III nitride compound semiconductor crystal layer on the first group III nitride compound semiconductor crystal layer,
wherein the crystal surface orientations of the at least one protruded portion except the vertex thereof are different from growth directions of a group III nitride compound semiconductor formed on the at least one protruded portion; and
the step of forming the first group III nitride compound semiconductor crystal layer is performed so that a first growth rate of the first group III nitride compound semiconductor crystal layer on the substrate surface between the protruded portions is higher than a second growth rate of the first group III nitride compound semiconductor crystal layer on the surface of the protruded portions such that the majority of the growth of the first group III nitride compound semiconductor crystal layer occurs on the substrate surface between the protruded portions.
5. The method of claim 4 , wherein each surface of the protruded portions has a different crystal direction from that of a (0001) surface.
6. The method of claim 4 , wherein the steps of growing are performing by epitaxial growing.
7. A method of manufacturing a light-emitting device comprising:
forming a plurality of protruded portions with a curved surface on a substrate;
growing a first group III nitride compound semiconductor crystal layer from the planar surface between the protruded portions until the curved surface of the protruded portions is covered and the first group III nitride compound semiconductor crystal layer has a planar upper surface; and
sequentially growing an active layer and a second group III nitride compound semiconductor crystal layer on the first group III nitride compound semiconductor crystal layer;
wherein the crystal surface orientations of the at least one protruded portion except the vertex thereof are different from growth directions of a group III nitride compound semiconductor formed on the at least one protruded portion; and
the step of growing the first group III nitride compound semiconductor crystal layer comprises the step of growing the first group III nitride compound semiconductor crystal layer on the substrate surface between the protruded portions without a facet growth on the curved surface of the protruded portions.
8. A method of manufacturing a light-emitting device comprising:
forming at least one protruded portion with a curved surface surrounded by a planar surface on a planarized substrate;
forming a first semiconductor crystal layer on the substrate to cover the curved surface of the protruded portions and planarizing said first semiconductor crystal layer; and
wherein the crystal surface orientations of the at least one protruded portion except the vertex thereof are different from growth directions of the semiconductor crystal layers; and
the step of forming the first semiconductor crystal layer comprises the step of growing the first semiconductor crystal layer on the substrate surface between the protruded portions covered without a facet growth on the curved surface of the protruded portions.
9. A method of manufacturing a light-emitting device comprising:
forming at least one protruded portion with a curved surface surrounded by a planar surface on a planarized substrate;
forming a first semiconductor crystal layer on the substrate to cover the curved surface of the protruded portions and planarizing said first semiconductor crystal layer; and
sequentially forming an active layer and a second semiconductor crystal layer on the first semiconductor crystal layer,
wherein the crystal surface orientations of the at least one protruded portion except the vertex thereof are different from growth directions of the semiconductor crystal layers; and
the step of forming the first semiconductor crystal layer is performed so that a first growth rate of the first semiconductor crystal layer on the substrate surface between the protruded portions is constantly higher than a second growth rate of the first semiconductor crystal layer on the surface of the protruded portions.
10. A method of manufacturing a light-emitting device comprising:
forming a plurality of protruded portions with curved surfaces on a substrate;
growing a first group III nitride compound semiconductor crystal layer from the planar surface between the protruded portions until the curved surface of the protruded portions is covered and the first group III nitride compound semiconductor crystal layer has a planar upper surface; and
sequentially growing an active layer and a second group III nitride compound semiconductor crystal layer on the first group III nitride compound semiconductor crystal layer,
wherein the crystal surface orientations of the at least one protruded portion except the vertex thereof are different from growth directions of a group III nitride compound semiconductor formed on the at least one protruded portion; and
the step of forming the first group III nitride compound semiconductor crystal layer is performed so that a first growth rate of the first group III nitride compound semiconductor crystal layer on the substrate surface between the protruded portions is constantly higher than a second growth rate of the first group III nitride compound semiconductor crystal layer on the surface of the protruded portions.
11. A method of manufacturing a light-emitting device comprising:
forming at least one protruded portion with a curved surface surrounded by a planar surface on a planarized substrate;
forming a first semiconductor crystal layer on the substrate to cover the curved surface of the protruded portions and planarizing said first semiconductor crystal layer; and
sequentially forming an active layer and a second semiconductor crystal layer on the first semiconductor crystal layer,
wherein the crystal surface orientations of the at least one protruded portion except the vertex thereof are different from growth directions of the semiconductor crystal layers; and
the step of forming the first semiconductor crystal layer is performed so that a first growth rate of the first semiconductor crystal layer on the substrate surface between the protruded portions is higher than a second growth rate of the first semiconductor crystal layer on the entire surface of the protruded portions.
12. A method of manufacturing a light-emitting device comprising:
forming a plurality of protruded portions with curved surfaces on a substrate;
growing a first group III nitride compound semiconductor crystal layer from the planar surface between the protruded portions until the curved surface of the protruded portions is covered and the first group III nitride compound semiconductor crystal layer has a planar upper surface; and
sequentially growing an active layer and a second group III nitride compound semiconductor crystal layer on the first group III nitride compound semiconductor crystal layer,
wherein the crystal surface orientations of the at least one protruded portion except the vertex thereof are different from growth directions of a group III nitride compound semiconductor formed on the at least one protruded portion; and
the step of forming the first group III nitride compound semiconductor crystal layer is performed so that a first growth rate of the first group III nitride compound semiconductor crystal layer on the substrate surface between the protruded portions is higher than a second growth rate of the first group III nitride compound semiconductor crystal layer on the entire surface of the protruded portions.