Method for manufacturing flash memory device
View Patent ↗A flash memory device incorporating: a semiconductor substrate having an active region and a field region defined therein; a device isolation layer formed in the field region of the substrate; a floating gate having an edge portion overlapping the device isolation layer, the overlapped portion being etched back a depth about equal to a height of a protruding portion of the device isolation layer, the floating gate having a tunneling oxide layer interposed in the active region of the semiconductor substrate; and a gate insulation layer and a control gate sequentially formed on the floating gate.
1. A method of manufacturing a flash memory device, comprising:
preparing a semiconductor substrate having an active region and a field region;
forming a device insulating layer in the field region;
forming a tunneling oxide layer on the active region;
forming a first polysilicon layer on the tunneling oxide layer;
coating a photoresist on the first polysilicon layer and selectively patterning the coated photoresist to define a floating gate region, wherein the patterned photoresist is only on the active region;
etching by a predetermined thickness a portion of the first polysilicon layer overlapping the device insulating layer using the patterned photoresist as a mask;
forming a polymer on sides of the patterned photoresist;
forming a floating gate by selectively removing the polysilicon layer using the photoresist and the polymer as a mask; and
removing the photoresist and the polymer.
2. The method according to claim 1 , further comprising:
forming a gate insulating layer on the floating gate; and
forming a control gate on the gate insulating layer.
3. The method according to claim 1 , wherein the polymer is formed using a fluorine-based gas.
4. The method according to claim 1 , wherein removing the photoresist and the polymer comprises performing an oxygen ashing process and a cleaning process.
5. The method according to claim 1 , further comprising forming a planarization layer on the first polysilicon layer prior to the coating of the photoresist.
6. The method according to claim 5 , wherein the planarization layer is an anti-reflective layer formed of an organic material.
7. The method according to claim 1 , wherein etching an overlapped portion of the first polysilicon layer causes the first polysilicon layer to have the same roughness as a surface of the first polysilicon layer formed on the active region.
8. A method of manufacturing a flash memory device, comprising:
providing a substrate having a field region and an active region;
forming a device isolation layer in the field region;
forming a polysilicon layer on the substrate;
forming a planarization layer on the polysilicon layer;
coating a photoresist on the planarization layer, and patterning the coated photoresist, wherein the patterned photoresist is only on the active region;
removing a portion of the planarization layer and the polysilicon layer formed on the field region by using the patterned photoresist as a mask, such that a surface of the polysilicon layer formed on the field region has the same roughness as a surface of the polysilicon layer below the patterned photoresist;
forming a polymer sidewall on the patterned photoresist; and
etching the polysilicon layer to form a floating gate.
9. The method according to claim 8 , wherein the floating gate is formed by etching the polysilicon layer formed on the field region using the polymer sidewall and patterned photoresist as a mask.
10. The method according to claim 8 , further comprising forming a tunneling oxide layer on the active region of the substrate.
11. The method according to claim 8 , wherein both edges of the floating gate overlap a portion of the device isolation layer formed in the field region.
12. The method according to claim 8 , wherein the planarization layer is formed of an organic material.
13. The method according to claim 8 , wherein the polymer is formed using a fluorine-based gas.
14. The method according to claim 8 , further comprising removing the photoresist and the polymer by using an oxygen ashing process and a cleaning process.