Method for controlling stage apparatus
At least one exemplary embodiment is directed to a control method for controlling a stage apparatus including a base and a stage, the base including first and second coil phases, the stage including a plurality of magnets. The control method includes a first energization step of rotating the stage to a stable angle by contemporaneously energizing a plurality of coils comprising the first coil phase and a second energization step of rotating the stage to a stable angle by sequentially energizing coils comprising the second coil phase one by one.
1. A control method for controlling a stage apparatus including a base and a stage, the base including first and second coil phases, the stage including a plurality of magnets, the control method comprising:
a first energization step of rotating the stage to a stable angle by contemporaneously energizing coils comprising the first coil phase; and
a second energization step of rotating the stage to a stable angle by sequentially energizing coils comprising the second coil phase one by one.
2. The control method according to claim 1 , wherein, in each of the first and second energization steps, a constant current is supplied.
3. The control method according to claim 1 , further comprising a third energization step of rotating the stage to a stable angle by contemporaneously energizing coils selected from the first coil phase after the second energization step.
4. The control method according to claim 1 , further comprising a step of determining whether the rotation of the stage is normal or not.
5. The control method according to claim 1 , wherein the first coil phase includes a first coil unit and a second coil unit, and
wherein, in the first energization step, a first current is supplied to the first coil unit and a second current is supplied to the second coil unit, the direction of the first current being opposite to the direction of the second current.
6. A control method for controlling a stage apparatus including a base and a stage, the base including first and second coil phases, the stage including a plurality of magnets, the control method comprising:
a first energization step of rotating the stage to a stable angle by contemporaneously energizing coils comprising the first coil phase;
a second energization step of rotating the stage to a stable angle by sequentially energizing coils comprising the second coil phase one by one;
a determining step of determining whether the orientation of the stage is normal; and
a changing step of changing a direction of a current to supply in the first and second energization steps, when it is determined the orientation of the stage is not normal in the determining step.