Method of manufacturing semiconductor device
View Patent ↗A gate insulating film and a gate electrode are formed on a silicon substrate. The gate insulating film contains at least hafnium, oxygen, fluorine, and nitrogen. The fluorine concentration is high in the vicinity of an interface with the silicon substrate and progressively decreases with decreasing distance from the gate electrode. The nitrogen concentration is high in the vicinity of an interface with the gate electrode and progressively decreases with decreasing distance from the silicon substrate. The fluorine concentration in the vicinity of the interface with the silicon substrate is preferably 1×10 19 cm −3 or more. The nitrogen concentration in the vicinity of the interface with the gate electrode is preferably 1×10 20 cm −3 or more.
1. A method for manufacturing a semiconductor device, comprising:
ion-implanting fluorine in a silicon substrate;
thermally oxidizing said silicon substrate to form a fluorine-containing silicon oxide film on said silicon substrate;
forming a high dielectric constant insulating film on said fluorine-containing silicon oxide film;
forming a silicon nitride film on said high dielectric constant insulating film, said fluorine-containing silicon film, said high dielectric constant insulating film, and said silicon nitride film constituting a gate insulating film structure;
forming a silicon film on said silicon nitride film;
processing said silicon film to form a gate electrode; and
heat treating said silicon substrate to diffuse fluorine from said fluorine-containing silicon oxide film and nitrogen from said silicon nitride film into said high dielectric constant insulating film, wherein, in said gate insulating film structure, concentration of fluorine progressively decreases from an interface of said gate insulating film structure with said silicon substrate to an interface of said gate insulating film structure with said gate electrode, and concentration of nitrogen progressively decreases from the interface of said gate insulating film structure with said gate electrode to the interface of said gate insulating film structure with said silicon substrate.
2. The method as claimed in claim 1 , further comprising, after forming said gate electrode, processing said gate insulating film structure including said silicon nitride film, said high dielectric constant insulating film, and said fluorine-containing silicon oxide film, using said gate electrode as a mask, to form a gate insulating film.
3. The method as claimed in claim 1 , including ion-implanting fluorine at a dosage in a range from 1×10 12 cm −2 to 1×10 16 cm −2 .
4. The method as claimed in claim 1 , wherein said high dielectric constant insulating film is a material selected from the group consisting of HfO 2 , HfAlO x , and HfSiO x .
5. A method for manufacturing a semiconductor device, comprising:
thermally oxidizing a silicon substrate to form a silicon oxide film on said silicon substrate;
forming a high dielectric constant insulating film on said silicon oxide film;
plasma nitriding said high dielectric constant insulating film to form a plasma-nitrided portion, said silicon oxide film and said high dielectric constant film, including said plasma-nitrided portion, constituting a gate insulating film structure;
after the plasma nitriding, forming a silicon film on said high dielectric constant insulating film;
processing said silicon film to form a gate electrode;
ion-implanting fluorine in said silicon substrate, using said gate electrode as a mask; and
heat-treating said silicon substrate to diffuse fluorine from said silicon substrate to transform said silicon oxide film into a fluorine-containing silicon oxide film and nitrogen from said plasma-nitrided portion of said high dielectric constant insulating film into said high dielectric constant insulating film, wherein, in said gate insulating film structure, concentration of fluorine progressively decreases from an interface of said gate insulating film structure with said silicon substrate to an interface of said gate insulating film structure with said gate electrode, and concentration of nitrogen progressively decreases from the interface of said gate insulating film structure with said gate electrode to the interface of said gate insulating film structure with said silicon substrate.
6. The method as claimed in claim 5 , further comprising, after forming said silicon film, forming a silicon oxide film on said silicon film, wherein forming said gate electrode includes processing said silicon oxide film and said silicon film.
7. The method as claimed in claim 5 , further comprising, after forming said gate electrode, processing said gate insulating film structure, including said high dielectric constant insulating film, including said plasma-nitrided portion, and said silicon oxide film, using said gate electrode as a mask, to form a gate insulating film.
8. The method as claimed in claim 5 , including ion-implanting fluorine at a dosage in a range from 1×10 12 cm −2 to 1×10 16 cm −2 .
9. The method as claimed in claim 5 , wherein said high dielectric constant insulating film is a material selected from the group consisting of HfO 2 , HfAlO x , and HfSiO x .