Semiconductor local interconnect and contact
View Patent ↗An integrated circuit is provided. A gate dielectric and a gate are provided respectively on and over a semiconductor substrate. A junction is formed adjacent the gate dielectric and a shaped spacer is formed around the gate. A spacer is formed under the shaped spacer and a liner is formed under the spacer. A first dielectric layer is formed over the semiconductor substrate, the shaped spacer, the spacer, the liner, and the gate. A second dielectric layer is formed over the first dielectric layer. A local interconnect opening is formed in the second dielectric layer down to the first dielectric layer. The local interconnect opening in the first dielectric layer is opened to expose the junction in the semiconductor substrate and the first gate. The local interconnect openings in the first and second dielectric layers are filled with a conductive material.
1. An integrated circuit comprising:
a semiconductor substrate having a first gate dielectric and a first gate respectively on and over the semiconductor substrate, the semiconductor substrate having a junction adjacent the first gate dielectric;
a first liner over the semiconductor substrate around the first gate;
a first spacer on the first liner;
a first shaped spacer on the first spacer;
a first dielectric layer over the semiconductor substrate having a local interconnect opening provided therein;
a second dielectric layer over the first dielectric layer having a local interconnect opening provided therein; and
a conductive material in the local interconnect openings.
2. The integrated circuit as claimed in claim 1 wherein the first liner and the first spacer are of different materials having high etch selectivity between the different materials.
3. The integrated circuit as claimed in claim 1 wherein the first spacer and the first shaped spacer are of different materials having high etch selectivity between the different materials.
4. The integrated circuit as claimed in claim 1 wherein the first dielectric layer and the second dielectric layer are of different materials having high etch selectivity between the different materials.
5. The integrated circuit as claimed in claim 1 wherein:
the semiconductor substrate has a second gate dielectric and a second gate respectively on and over the semiconductor substrate, the semiconductor substrate has an additional junction adjacent the second gate dielectric;
a second liner is over the semiconductor substrate around the second gate;
a second spacer is on the second liner;
a second shaped spacer is on the second spacer;
the first dielectric layer has an isolated contact opening provided therein;
the second dielectric layer has an isolated contact opening provided therein exposing the junction in the semiconductor substrate adjacent the second gate dielectric; and
a conductive material in the isolated contact opening in the second dielectric layer and the isolated contact opening in the first dielectric layer.