Phase contrast microscope for short wavelength radiation and imaging method
A phase contrast x-ray microscope has a phase plate that is placed in proximity of and attached rigidly to the objective to form a composite optic. This enables easier initial and long-term maintenance of alignment of the microscope. In one example, they are fabricated on the same high-transmissive substrate. The use of this composite optic allows for lithographic-based alignment that will not change over the lifetime of the instrument. Also, in one configuration, the phase plate is located between the test object and the objective.
1. A method for fabricating a composite optic, comprising:
forming fiducials on a substrate;
forming an objective on the substrate;
forming a phase plate on the substrate and on an opposite side of the substrate from the objective; and
aligning the phase plate relative to the objective using the fiducials.
2. A method as claimed in claim 1 , wherein the step of forming the phase plate comprises forming a phase ring.
3. A method as claimed in claim 1 , wherein the step of forming the objective comprises forming a zone plate.
4. A method as claimed in claim 1 , wherein the step of forming the objective comprises forming a Fresnel lens.
5. A method as claimed in claim 1 , wherein the substrate is curved in the direction of a test object.
6. A method for fabricating a composite optic, comprising:
forming fiducials on a substrate, wherein the substrate is curved in the direction of a test object;
forming an objective on the substrate;
forming a phase plate on the substrate;
aligning the phase plate relative to the objective using the fiducials.
7. A method as claimed in claim 6 , wherein the step of forming the objective comprises forming a zone plate.
8. A method as claimed in claim 6 , wherein the step of forming the objective comprises forming a Fresnel lens.
9. A method as claimed in claim 6 , further comprising forming the objective and the phase plate on opposite sides of the substrate.
10. A method as claimed in claim 6 , wherein the step of forming the phase plate comprises forming a phase ring.
11. A method for fabricating a composite optic, comprising:
forming fiducials on a substrate;
forming an objective on the substrate;
forming a phase ring on the substrate; and
aligning the phase ring relative to the objective using the fiducials.
12. A method as claimed in claim 11 , further comprising forming the phase ring on top of the objective.
13. A method as claimed in claim 11 , wherein the step of forming the objective comprises forming a zone plate.
14. A method as claimed in claim 11 , wherein the step of forming the objective comprises forming a Fresnel lens.
15. A method as claimed in claim 11 , further comprising forming the phase ring on top of the objective.
16. A method as claimed in claim 11 , wherein the substrate is curved in the direction of a test object.
17. A method as claimed in claim 11 , further comprising forming the objective and the phase ring on opposite sides of the substrate.