Method for manufacturing CMOS image sensor
Disclosed is a CMOS image sensor and a method for manufacturing a CMOS image sensor. The method includes: (a) forming a resist film on a semiconductor substrate comprising a light sensing part, a protecting layer over the light sensing part, and an exposed bonding pad; (b) forming a color filter array on the thin resist film; (c) forming a plurality of microlenses over the color filter array; and (d) etching the resultant structure until the bonding pad is exposed.
1. A method for manufacturing a CMOS image sensor, comprising the steps of:
(a) forming a resist film on a protecting layer over a light sensing part of a semiconductor substrate and on an exposed bonding pad;
(b) forming a color filter array on the resist film;
(c) forming a planarization layer on the color filter array;
(d) forming a plurality of microlenses on the planarization layer; and
(e) after forming the plurality of microlenses, etching the planarization layer and the resist film on the bonding pad until the bonding pad is exposed, all microlens material is removed between adjacent microlenses, and a concave profile is formed in the planarization layer between adjacent microlenses.
2. The method of claim 1 , wherein the resist film comprises an organic material.
3. The method of claim 2 , wherein the resist film has at least a predetermined transparency to visible light.
4. The method of claim 1 , wherein the resist film comprises a thermosetting resin.
5. The method of claim 1 , wherein the resist film comprises an acrylic resin.
6. The method of claim 1 , wherein the resist film has a thickness not more than 50 nm.
7. The method of claim 1 , wherein the etching step removes the resist film covering the bonding pad and forms a gap between the microlenses.
8. The method of claim 1 , wherein the etching step comprises etching with a plasma comprising an oxygen source.
9. The method of claim 8 , wherein the oxygen source comprises O 2 .
10. The method of claim 1 , wherein the microlenses comprise a second resist material, and etching the resist film simultaneously etches the microlenses until the concave profile is formed in the planarization layer.
11. The method of claim 1 , further comprising, before the etching step, forming an organic material layer over an entire surface of the substrate including the plurality of microlenses, and wherein etching the planarization layer and the resist film further comprises simultaneously etching the organic material layer.
12. A method for manufacturing a CMOS image sensor, comprising the steps of:
(a) forming a resist film on a protecting layer over a light sensing part of a semiconductor substrate and on an exposed bonding pad;
(b) forming a color filter array on the resist film;
(c) forming a planarization layer on the color filter array;
(d) forming a plurality of microlenses on the planarization layer, wherein adjacent microlenses have a space therebetween exposing regions of the planarization layer;
(e) forming an organic material layer over an entire surface of the substrate including the plurality of microlenses; and
(f) etching the organic material layer and the protecting layer on the bonding pad until the bonding pad is exposed and a concave profile is formed in the organic material layer and the planarization layer between adjacent microlenses.
13. The method of claim 12 , wherein the organic material layer comprises a photoresist or a thermosetting resin.
14. The method of claim 12 , wherein the organic material layer has a thickness of 30 nm˜100 nm.
15. The method of claim 12 , wherein the resist film comprises an organic material or a thermosetting resin having a predetermined transparency to visible light.
16. The method of claim 12 , wherein the etching step removes the organic material layer and the resist film covering the bonding pad, and forms a gap between the micro lenses.
17. The method of claim 12 , wherein the etching step utilizes a plasma comprising oxygen.
18. The method of claim 12 , comprising the step of irradiating the plurality of microlenses with ultraviolet light before forming the organic material layer.
19. The method of claim 12 , wherein the organic material layer comprises a second resist material, and etching the protecting layer simultaneously etches the microlenses until the concave profile is formed in the organic material layer.