Maskless nanofabrication of electronic components
View Patent ↗The present invention relates to systems, materials and methods for the formation of conducting, semiconducting, and dielectric layers, structures and devices from suspensions of nanoparticles. Drop-on-demand systems are used in some embodiments to fabricate various electronic structures including conductors, capacitors, FETs. Selective laser ablation is used in some embodiments to pattern more precisely the circuit elements and to form small channel devices.
1. A method of forming a nanostructure comprising:
depositing a suspension containing nanoparticles onto a substrate forming thereby a pattern;
ablating said pattern to produce an ablated pattern; and
sintering said ablated pattern to produce said nanostructure.
2. A method as in claim 1 , wherein said depositing is drop-on-demand.
3. A method as in claim 1 , wherein said ablating is laser ablating.
4. A method as in claim 3 , wherein said laser ablating is short-pulse laser ablating.
5. A method as in claim 4 , wherein said short-pulse laser ablating is by a laser pulse having a duration in the range from about 1 nanosecond to about 500 nanoseconds.
6. A method as in claim 4 , wherein said short-pulse laser ablating is by a laser pulse having a duration in the range from about 2 femtoseconds to about 500 femtoseconds.
7. A method of forming at least two nanostructures comprising:
forming a first nanostructure on a substrate, wherein said first nanostructure is sintered;
depositing a suspension containing nanoparticles onto said substrate forming a pattern thereon;
ablating material from said pattern by laser ablation to produce an ablated pattern, wherein the power of said laser is sufficient for laser ablation of said pattern but insufficient for substantial ablation of said first nanostructure; and
sintering said nanoparticles in said ablated pattern to produce a second nanostructure.
8. A method as in claim 7 , wherein said pattern lies at least in part on said first nanostructure.
9. A method of forming a capacitor comprising:
depositing a first suspension to form a bottom electrode of said capacitor;
depositing a dielectric layer at least partially on said bottom electrode;
depositing a second suspension containing nanoparticles in a pattern onto said substrate, wherein said second suspension lies partially on said dielectric layer substantially above said bottom electrode; and
sintering said second suspension to form a top electrode of said capacitor, wherein said method further comprises laser ablating to alter the structure of at least one of said bottom electrode, said dielectric layer or said top electrode.
10. A method as in claim 9 , further comprising laser ablating said top electrode wherein said laser ablating is selective pulsed laser ablation by differential ablation threshold.
11. A method of forming an organic field effect transistor comprising:
forming a source nanostructure and a drain nanostructure on a substrate wherein said forming comprises depositing a suspension of nanoparticles and sintering; and, forming an organic semiconducting structure between said source nanostructure and said drain nanostructure; and, forming a dielectric layer on said organic semiconducting structure; and,
forming a gate electrode on said dielectric layer wherein said forming comprises depositing a suspension of nanoparticles and sintering.
12. A method as in claim 11 , further comprising laser ablating at least one of said source nanostructure, said drain nanostructure, said organic semiconducting structure, said dielectric layer or said gate electrode.
13. A method of forming self-aligned channels in an organic field effect transistor comprising:
forming a source nanostructure and a drain nanostructure on a substrate wherein said forming comprises depositing a suspension of nanoparticles and sintering;
defining a channel region between said source nanostructure and said drain nanostructure with laser ablation;
forming an organic semiconducting structure between said source nanostructure and said drain nanostructure;
forming a dielectric layer on said organic semiconducting structure; and
forming a gate electrode on said dielectric layer wherein said forming comprises depositing a suspension of nanoparticles and sintering.
14. A method as in claim 1 , wherein the substrate is a flexible substrate.
15. A method as in claim 14 , wherein the flexible substrate comprises a polymer.
16. A method as in claim 7 , wherein the substrate is a flexible substrate.
17. A method as in claim 16 , wherein the flexible substrate comprises a polymer.
18. A method as in claim 4 , wherein said short-pulse laser ablating is by a laser pulse having a duration in the picosecond range.
19. A method as in claim 4 , wherein said short-pulse laser ablating is by a laser pulse having a duration in the microsecond range.