Methods and systems for semiconductor testing using reference dice
View Patent ↗Methods and systems of semiconductor testing where reference dice and non-reference dice in a wafer and/or lot are tested differently. In one embodiment of the invention, geography, lithography exposure, other characteristics, performance and/or behavior are taken into account when selecting reference dice, thereby improving the likelihood that the response of reference dice to testing is well representative of the wafer and/or lot. In one embodiment, based on data from the testing of reference dice, the test flow for non-reference dice and/or other testing may or may not be adjusted.
1. A system for semiconductor testing, comprising:
a test manager configured to determine a group of semiconductor dice in a wafer which can be assumed to respond similarly to testing, wherein said group includes less than all dice in said wafer, and configured to select at least one reference die from said group for testing differently than other dice in said group which were not selected as reference dice, wherein said at least one reference die includes less than all dice in said group.
2. The system of claim 1 , wherein said test manager is configured to include in said group dice which are geographical proximity neighbors.
3. The system of claim 1 , wherein said test manager is configured to include in said group dice which are in a same lithography exposure.
4. The system of claim 1 , wherein said test manager is configured to include in said group dice out which are in a same position across lithography exposures.
5. The system of claim 1 , wherein said test manager is configured to include in said group dice which are in a same geographical ring.
6. The system of claim 1 , wherein said test manager is configured to select a die from said group as a reference die at least partly because said die is next to an E-test structure.
7. The system of claim 1 , wherein said test manager is configured to select a die from said group as a reference die at least partly because said die is from a high failure area.
8. The system of claim 1 , wherein said test manager is configured to select a die from said group as a reference die randomly.
9. The system of claim 1 , wherein said test manager is configured to select a die from said group as a reference die at least partly because of a lithography exposure including said die.
10. The system of claim 1 , wherein said test manager is configured to select a die from said group as a reference die at least partly because of a position of said die in a lithography exposure.
11. The system of claim 1 , wherein said test manager is configured to select a die from said group as a reference die at least partly because said die is not a geographical proximity neighbor of another reference die.
12. The system of claim 1 , wherein said test manager is configured to select a die from said group as a reference die at least partly because of a geographical ring including said die.
13. The system of claim 1 , further comprising: offline tools configured to define which tests are performed on said at least one reference die and not performed on said other dice in said group unless activated.
14. The system of claim 13 , wherein said offline tools are further configured to define a default test workflow for said wafer.
15. The system of claim 14 , wherein said offline tools are further configured to simulate activation criteria for changing said default test workflow.
16. The system of claim 13 , wherein said offline tools are further configured to simulate activation criteria for activating said tests to be performed on said other dice.
17. A system of semiconductor testing, comprising:
a test cell configured to identify or not identify a semiconductor die provided for testing as a reference die which had been previously selected as representative of a group of dice in a wafer that can be assumed to respond similarly to testing, wherein said group includes less than all dice in said wafer, and wherein less than all dice in said group had been previously selected as a reference die; configured to test said die with a reference die test flow, if said die is identified as a reference die, and configured to test said die with a non-reference die test flow if said die is not identified as a reference die.