Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
View Patent ↗A method for patterning a layer increases the density of features formed over an initial patterning layer using a series of self-aligned spacers. A layer to be etched is provided, then an initial sacrificial patterning layer, for example formed using optical lithography, is formed over the layer to be etched. Depending on the embodiment, the patterning layer may be trimmed, then a series of spacer layers formed and etched. The number of spacer layers and their target dimensions depends on the desired increase in feature density. An in-process semiconductor device and electronic system is also described.
1. A method used during fabrication of a semiconductor device, the method comprising:
providing a layer to be etched, the layer to be etched having a substantially planar elevationally outermost surface;
forming a plurality of sacrificial first spacers on the outermost surface;
forming a second spacer layer over the plurality of sacrificial first spacers;
removing a portion of the second spacer layer to form a plurality of triads of spacers on the outermost surface, the triads comprising the first spacer bracketed by second spacers on the surface with each of the spacers within the triad having a different elevational thickness and the second spacers contacting the first spacer;
forming a conformal layer over the triad;
removing a portion of the conformal layer to form groups of five adjacent spacers, the individual groups comprising the triad bracketed by third spacers; removing the second spacers; and
etching the layer to be etched using the first and third spacers as a pattern to form a plurality of substantially similar features within the layer to be etched.
2. The method of claim 1 wherein the etching forms recesses aligned substantially equidistant along the outermost surface of the layer to be etched.
3. The method of claim 1 wherein the surfaces of all of the spacers are non-planar.
4. The method of claim 1 wherein the forming the second spacer layer on the plurality of sacrificial first spacers comprises providing a spacing layer to fill between some of the first spacers but not filling between all of the first spacers.
5. The method of claim 4 wherein the spacing layer alternates between filled and unfilled between first spacers in one cross section of the device.
6. The method of claim 1 wherein each spacer within the group of five spacers has a different elevational thickness.
7. The method of claim 1 wherein the groups of five spacers are spaced apart from one another.
8. The method of claim 1 wherein individual spacers within the groups of five spacers contact one another.
9. The method of claim 1 wherein the groups of five spacers are spaced apart from one another a distance that is substantially the same as the width of the second spacers.
10. The method of claim 1 wherein upon removal of the second spacers, the remaining spacers are substantially equally spaced along the surface to be etched.