Semiconductor device using a conductive film and method of manufacturing the same
View Patent ↗A semiconductor device has a capacitive element including a first conductive film formed on the bottom and wall surfaces of an opening formed in an insulating film on a substrate, a dielectric film formed on the first conductive film, and a second conductive film formed on the dielectric film. The dielectric film of the capacitive element is crystallized. The first and second conductive films are made of a polycrystal of an oxide, a nitride or an oxynitride of a noble metal.
1. A semiconductor device comprising a capacitive element including a first conductive film formed on the bottom and wall surfaces of an opening formed in an insulating film on a substrate, a dielectric film formed on the first conductive film, and a second conductive film formed on the dielectric film,
wherein the dielectric film of the capacitive element is crystallized, and
at least the first conductive film is made of a polycrystal of an oxide or an oxynitride of a noble metal.
2. The semiconductor device of claim 1 , wherein the second conductive film is made of a polycrystal of an oxide or an oxynitride of a noble metal.