System and method for treating surfaces of components
A system ( 10 ) for coating surfaces of a workpiece ( 12 ) comprises a biasing system ( 242 ) for connection to said workpiece ( 12 ) and an anode ( 76 ) such as to negatively bias the workpiece relative to the anode and a vacuum source ( 42, 44 ) for evacuating an interior of the workpiece ( 12 ). A gas supply ( 224, 226, 228 ) is employed for introducing a gas containing a treatment material to said workpiece and a control system ( 244 ) controls the biasing system ( 242 ), the vacuum source ( 42, 44 ) and the gas supply ( 224, 226, 228 ) so as to establish a hollow cathode effect within the workpiece ( 12 ). A pair of coupling heads ( 16, 18 ) are supported on articulated arms ( 22, 24, 26 ) movable in one or more of three axes and include removable shields ( 78 ) to protect the heads ( 16, 18 ) and an anode mount ( 74 ) for receiving an anode ( 76 ). The articulated arms allow the system to accommodate a plurality of different shaped and different sized workpieces while the shields protect the coupling heads during a deposition process.
1. A system for treating an electrically conductive workpiece having an exterior and an interior comprising:
a biasing system, for connection to a workpiece and an anode such as to negatively bias a workpiece relative to an anode;
a vacuum source, for evacuating an interior of a workpiece that is sealed, while being treated, from an exterior of the workpiece;
a gas supply, for introducing a gas containing a treatment material to said interior of the workpiece;
a control system for controlling the biasing system, the vacuum source and the gas supply; and
a coupling head sealing the workpiece and comprising:
a casing, having an inlet for receiving gas from said gas supply and an outlet for connecting with said interior of the workpiece to be treated; and
a removable shield, at least partially shielding said casing from any gas introduced thereto.
2. The system of claim 1 wherein said shield comprises a circular shield having an inlet therein for receiving gas into the interior thereof and an outlet for coupling to the outlet of the coupling head.
3. The system of claim 1 wherein said shield includes an anode aperture for receiving an anode when inserted into said casing.
4. The system of claim 1 wherein said casing includes an anode mount for receiving an anode within the interior of said casing.
5. The system of claim 1 wherein said anode mount comprises an external mount through which said anode may be inserted so as to protrude into said casing.
6. The system of claim 1 further including a size adjustable coupling for coupling said coupling head to a plurality of different sized workpieces.
7. The system of claim 6 wherein said coupling includes an ultra-torr type fitting.
8. The system of claim 1 further comprising an adjustable mount onto which said coupling head is positioned and in which said mount is adjustable in one or more of three axes.
9. The system of claim 8 wherein said adjustable mount comprises a linear track.
10. The system of claim 8 wherein said adjustable mount comprises an articulated arm.
11. The system of claim 8 wherein said adjustable mount comprises an articulated arm and a linear track.
12. The system of claim 8 wherein said adjustable mount comprises a plurality of pivotal arms, one or more of which is mounted about a substantially vertical axis for pivotal movement relative to an adjacent arm.
13. The system of claim 8 wherein said adjustable mount comprises an articulated arm and includes a gas passageway for conveying gas to said coupling head.
14. The system of claim 8 wherein said adjustable mount comprises an articulated arm having an interior gas passageway for conveying gas to said coupling head.
15. The system of claim 8 wherein said adjustable mount comprises a plurality of pivot arms mounted in bearings for pivotal movement relative to an adjacent arm.
16. The system of claim 8 wherein said adjustable mount comprises a plurality of pivot arms having gas passageways therethrough and inlets and outlets for communication with adjacent arms and having a gas seal between one or more of each pair of arms.
17. The system of claim 1 wherein said coupling head includes a closable opening having a location surface, and said shield includes a corresponding location flange and in which said shield is at least partially located within said housing by interaction of said location flanges.
18. The system of claim 17 wherein said closable opening includes a door having a transparent portion.
19. The system of claim 1 wherein said coupling head further includes a second location surface and said shield includes a second location flange.
20. The system of claim 1 further comprising two coupling heads located for accommodating a workpiece therebetween and for coupling to apertures provided in said workpiece.
21. The system of claim 20 wherein said gas supply includes a cross link between said coupling heads and includes two vacuum pumps, each of said vacuum pumps being connected to said cross link for evacuation of gas therein and further including an isolator valve between said pumps for isolating said pumps from each other.
22. The system of claim 1 comprising one or more vacuum pumps connected to said one or more coupling heads.
23. The system of claim 1 further including one or more plasma reflectors at an outlet from said one or more coupling heads.
24. The system as claimed in claim 23 wherein said one or more plasma reflectors comprise tapered reflectors.
25. The system of claim 1 wherein said gas supply includes a gas reservoir of one or more different gases and said control system includes a gas sequencing control for controlling the selective introduction of said one or more different gases to said system.
26. The system of claim 25 wherein said gas supply includes a heater for heating a liquid so as to produce said gas.
27. The system of claim 25 wherein said gas supply includes an evaporator for evaporating a liquid source of material.
28. The system of claim 25 wherein said gas supply includes a source of pressurized gas and a pressure controller for controlling the pressure and supply thereof.
29. The system of claim 1 wherein said biasing system is configured to apply a voltage such that a plasma is generated within said workpiece.
30. The system of claim 1 wherein said control system is configured for regulating said vacuum source and said gas source such as to establish a hollow cathode effect within said workpiece.
31. The system of claim 1 including an anode.
32. The system of claim 1 including a shield.
33. A system for treating an electrically conductive workpiece having an exterior and an interior comprising:
a biasing system, for connection to a workpiece and an anode such as to negatively bias a workpiece relative to an anode;
a vacuum source, for evacuating an interior of a workpiece that is sealed, while being treated, from an exterior of the workpiece;
a gas supply, for introducing a gas containing a treatment material to said interior of the workpiece;
a control system for controlling the biasing system, the vacuum source and the gas supply; and
a pair of coupling heads sealing the workpiece and comprising: an input coupling head having a casing, said casing having an inlet for receiving gas from said gas supply and an outlet for connecting with said interior of the workpiece to be treated; an output coupling head having a casing, said casing having an inlet for connection to and a said interior of the workpiece and for receiving gas from said workpiece and an outlet for connecting with said vacuum source; and a removable shield, at least partially shielding a casing from gas introduced thereto.
34. A method of operating the system of claim 1 further comprising the steps of:
connecting a workpiece to said coupling head such that the outlet of said coupling head is in flow communication with an interior of said workpiece;
reducing the pressure within the interior of said workpiece and applying a biasing voltage between the workpiece and the cathode such as to establish a hollow cathode effect and generate a plasma within said workpiece; and
introducing a gas containing a treatment material into said coupling head and passing it into said workpiece such as to allow for the deposition or implantation of treatment material.