Semiconductor device and method of manufacturing the same
View Patent ↗A method of manufacturing according to an embodiment of the present invention includes forming a seed metal layer 20 a on a supporting substrate 70 , forming an interconnect layer 10 including an interconnect 18 on the seed metal layer 20 a , removing the supporting substrate 70 after forming the interconnect layer 10 , and patterning the seed metal layer 20 a thus to form an interconnect 20 after removing the supporting substrate.
1. A semiconductor device comprising:
an insulating resin layer provided with a first via plug;
an adhesive conductive film provided on a first surface of said insulating resin layer;
a first interconnect provided on said adhesive conductive film not in direct contact with said insulating resin layer, said first interconnect being electrically connected to said first via plug through said adhesive conductive film;
said adhesive conductive film comprising two metal layers that are different from each other, said first interconnect comprising a metal that is the same as one of said two metal layers of said adhesive conductive film, said adhesive conductive film being more adhesive to said first interconnect and to said insulating resin layer than said insulating resin layer is to said first interconnect; and
a second interconnect provided directly on a second surface of said insulating resin layer and electrically connected to said first via plug, said second interconnect consisting substantially of a single material.
2. The semiconductor device according to claim 1 , further comprising:
a semiconductor chip provided on said first surface side of said insulating resin layer; and
an external electrode terminal provided on said second surface side of said insulating resin layer.
3. The semiconductor device according to claim 2 , further comprising:
a sealing resin covering said semiconductor chip.
4. The semiconductor device according to claim 2 , further comprising:
a second semiconductor chip provided on said second surface side of said insulating resin layer.
5. The semiconductor device according to claim 1 ,
wherein said first via plug and said second interconnect are made of the same metal so as to be in a body.
6. The semiconductor device according to claim 1 ,
wherein an insulating resin constituting said insulating resin layer is a photosensitive polyimide resin.
7. The semiconductor device according to claim 1 , further comprising:
a second via plug provided on said second surface side of said insulating resin layer, and having an end connected to said first via plug;
wherein said first and second via plugs are connected to each other via a second adhesive conductive film.
8. The semiconductor device according to claim 7 , further comprising:
a third interconnect connected to the other end of said second via plug.
9. A semiconductor device comprising:
an insulating resin layer provided with a first via plug;
an adhesive conductive film provided on a first surface of said insulating resin layer;
a first interconnect provided on said adhesive conductive film not in direct contact with said insulating resin layer, said first interconnect being electrically connected to said first via plug through said adhesive conductive film;
said adhesive conductive film comprising two metal layers that are different from each other, said first interconnect comprising a metal that is the same as one of said two metal layers of said adhesive conductive film, said adhesive conductive film being more adhesive to said first interconnect and to said insulating resin layer than said insulating resin layer is to said first interconnect;
a second interconnect provided directly on a second surface of said insulating resin layer and electrically connected to said first via plug, said second interconnect consisting substantially of a single material; and
a second via plug provided on said second surface side of said insulating resin layer, and having an end connected to said first via plug;
wherein said first and second via plugs are connected to each other via a second adhesive conductive film, and
wherein said first via plug is in such a tapered shape that the cross-sectional area gradually decreases as getting closer to said second via plug; and
said second via plug is in such a tapered shape that the cross-sectional area gradually decreases as getting closer to said first via plug.
10. The semiconductor device according to claim 1 , wherein said first via plug has a tapered shape.
11. The semiconductor device according to claim 7 , wherein said second via plug has a tapered shape.
12. The semiconductor device according to claim 7 , wherein said first and second via plugs have a tapered shape.
13. The semiconductor device according to claim 1 , wherein said first via plug extends through an entirety of said insulating resin layer from said first surface to said second surface.
14. The semiconductor device according to claim 9 , wherein said first via plug extends through an entirety of said insulating resin layer from said first surface to said second surface.
15. The semiconductor device according to claim 14 , wherein said second via plug directly contacts said first via plug at narrow ends of the respective tapered shapes.
16. The semiconductor device according to claim 1 , wherein said two metal layers are a copper layer and a titanium layer.
17. The semiconductor device according to claim 9 , wherein said two metal layers are a copper layer and a titanium layer.