Exposure apparatus and exposure method, and method of manufacturing electrical wiring board
View Patent ↗This invention provides: an exposure apparatus and exposure method based on a maskless exposure technique which uses a two-dimensional optical modulator, in which maskless exposure technique, the exposure apparatus and exposure method employ a first irradiation source optics for drawing a pattern based on exposure pattern data, and a second irradiation source optics for irradiating an energy ray onto a desired area of space on a region inclusive of a region in which the pattern has been drawn; and a method of manufacturing a wiring Substrate (Board); thus, highly accurate pattern forming based on the exposure pattern data is achieved at high throughput and at low costs.
1. An exposure method for processing a photosensitive material by irradiating, with a beam of light that has been processed into a pattern shape, the surface of an object to the exposed to light, which object includes said photosensitive material, and then developing the photosensitive material, the exposure method comprising:
a first exposure step for exposing and processing said photosensitive material by irradiating said photosensitive material with a position-selective beam of near-ultraviolet light at a wavelength of about 405 nm to form said pattern shape;
a second exposure step for suppressing occurrence of a reciprocity law failure during said first exposure step to thereby reduce overall exposure time required during the first exposure step comprising irradiating with a non-position-selective energy ray which is in wavelength range of 350 to 450 nm and having an irradiation area which includes a region irradiated during said first exposure step;
wherein said second exposure step is executed one of before said first exposure step, at the same time of as said first exposure step, and after said first exposure step.
2. The exposure method according to claim 1 , wherein the irradiation area of the second exposure step is greater than an irradiation area of the first exposure step.