Semiconductor storage device and method of manufacturing the same
View Patent ↗A method of manufacturing a semiconductor storage device according to an embodiment of the present invention includes forming dummy cells 61 1 , to 61 8 at a position adjacent to a reference cell 41 2 , and implanting an impurity into the dummy cells 61 1 , to 61 8 using a mask that covers the reference cell 41 2 . Here, the process of implanting the impurity is carried out so that the impurity exudes out of the dummy cells 61 1 , to 61 8 to the reference cell 41 2 .
1. A semiconductor storage device that reads out information stored in a memory cell through comparison with information of a reference cell serving as a standard,
wherein said memory cell has a first off-leak characteristic,
said reference cell has a second off-leak characteristic larger than said first off-leak characteristic, and
said reference cell includes a first region having a first impurity concentration located between two isolation regions and a second region having a second impurity concentration located between and in contact with at least one of said two isolation regions and said first region,
wherein said second region has a second impurity concentration higher than said first impurity concentration.
2. The semiconductor storage device according to claim 1 further having a dummy cell located on the respective sides of said reference cell;
wherein an impurity concentration of said dummy cell is equal to or higher than said second impurity concentration.
3. A semiconductor storage device that reads out information stored in a memory cell, the semiconductor storage device comprising:
a reference cell; and
a plurality of dummy cells surrounding said reference cell,
wherein said reference cell comprises:
a first region having a first impurity concentration located between two isolation regions; and
at least one second region having a second impurity concentration, said at least one second region located between at least one of said two isolation regions and said first region, and adjoining at least one of said two isolation regions and said first region,
wherein said second impurity concentration in said at least one second region controls a leakage characteristic of said reference cell, and
wherein said second region has a second impurity concentration higher than said first impurity concentration.