Glass substrate carrier assembly
A glass substrate carrier assembly has a shelf and multiple pickup caps. The shelf is connected electrically to ground and has a bar, two stands and two brackets. The bar has two ends. The stands are mounted respectively on and extend down from the ends of the bar, are connected electrically to ground and are electrically conductive. The brackets are electrically conductive, are mounted respectively on and extend perpendicularly inward from the stands below the bar and face each other, and each bracket is T-shaped and has a distal edge and multiple tabs. The tabs are electrically conductive and are mounted on and extend perpendicularly from the distal edge of the bracket. The pickup caps are electrically conductive and are mounted on the tabs. Static electricity will pass through the pickup cap, the tab, the bracket and the stands to ground so static electricity will be removed from the shelf.
1. A glass substrate carrier assembly comprising:
a movable shelf adapted for being connected electrically to ground and comprising
a bar having two ends;
two stands mounted respectively on and extending down from the ends of the bar, being electrically conductive and adapted for being connected electrically to ground, and each stand having an inner surface;
two brackets being electrically conductive, being mounted respectively on and extending perpendicularly inward from the inner surfaces of the stands below the bar and facing each other, and each bracket having
a distal edge; and
multiple tabs being electrically conductive and mounted on and extending perpendicularly from the distal edge of the bracket, and each tab having
an upper surface; and
a suction hole being formed through the tab; and
multiple pickup caps being resilient and electrically conductive and mounted respectively on the upper surfaces of the tabs, and each pickup cap having at least one through hole.
2. The carrier assembly as claimed in claim 1 , wherein each pickup cap comprises a carbonaceous material.
3. The carrier assembly as claimed in claim 1 , wherein each pickup cap comprises graphite.
4. The carrier assembly as claimed in claim 1 , wherein each pickup cap comprises metal.
5. The carrier assembly as claimed in claim 1 , wherein
each tab further has a recess formed in the upper surface of the tab;
the suction hole of each tab communicates with the recess in the tab; and
the pickup caps are mounted respectively in the recesses in the tabs.
6. The carrier assembly as claimed in claim 5 , wherein each pickup cap further has
a mounting collar being a ring and mounted in the recess in a corresponding tab and having
an upper end; and
a lip extending inward from the upper end;
a seal having
a central hole;
an outer wall; and
an annular recess formed in the outer wall and engaging the lip on the mount collar to hold the seal in the mounting collar; and
a cap mounted on the mounting collar securely against the seal and having at least one hole corresponding to and communicating with the suction hole in the corresponding tab.