Vacuum-coating machine with motor-driven rotary cathode
In a vacuum-coating machine ( 1 ), the drive unit ( 6 ) is mounted compliantly to the chamber housing ( 3 ) by means of an elastic intermediate plate ( 14 ), such that said drive unit can follow a wobbling motion imposed by the rotary cathode ( 10 ), with the support bearing ( 19 ) of the free end of the rotary cathode ( 18 ) capable of being of a rigid design.
1 - 10 . (canceled)
11 . A vacuum-coating machine comprising:
at least one process chamber with a chamber housing;
at least one rotary cathode supported relative to the chamber housing, the rotary cathode driven by a drive unit; and
wherein the drive unit is arranged by a compliant suppression relative to the chamber housing.
12 . The vacuum-coating machine in accordance with claim 11 , wherein the compliant suspension of the drive unit includes an intermediate plate arranged between the chamber housing and the drive unit.
13 . The vacuum-coating machine in accordance with claim 12 wherein the drive unit is mounted to the chamber wall by fasteners which extend through drilled holes in the drive unit and the intermediate plate.
14 . The vacuum-coating machine in accordance with claim 12 , wherein the intermediate plate is mounted only to the chamber housing and the drive unit is mounted only to the intermediate plate.
15 . The vacuum-coating machine in accordance with claim 11 , wherein the chamber housing includes a wall opening, the drive assembly having a drive assembly fed with a diameter, the rotary cathode having a wobbling deflection, the wall opening being at least that of the diameter of the drive assembly fed plus twice the wobbling deflection of the rotary cathode.
16 . The vacuum-coating machine in accordance with claim 12 wherein the intermediate plate is formed from an elastomer.
17 . The vacuum-coating machine in accordance with claim 17 , wherein the elastomer comprises a rubber material, especially from a natural rubber or silicone.
18 . The vacuum-coating machine in accordance with claim 17 , wherein the rubber material comprises a natural rubber or silicone.
19 . The vacuum-coating machine in accordance with claim 16 , wherein the elastomer has a Shore hardness of 50° minimum and 80° maximum Shore hardness.
20 . The vacuum-coating machine in accordance with claim 19 , wherein the Shore hardness is in a range of 60° to 70° Shore hardness.
21 . The vacuum-coating machine in accordance with claim 12 wherein the intermediate plate is formed from an electrically nonconducting material.
22 . The vacuum-coating machine in accordance with claim 11 , wherein the rotary cathode is supported by a support bearing at a free end of the rotary cathode.
23 . The vacuum-coating machine in accordance with claim 22 , wherein the support bearing comprises a rigid bearing.
24 . The vacuum-coating machine in accordance with claim 11 , wherein the chamber housing has an outer wall, the outer wall having a surface section for contact with the intermediate plate.
25 . The vacuum-coating machine in accordance with claim 24 , wherein the surface section includes a cutout or recess.
26 . A vacuum-coating machine comprising:
a chamber housing;
at least one rotary cathode, the rotary cathode supported relative to the housing, the housing having a chamber wall; and
a drive unit driving the rotary cathode through the chamber wall, the drive unit mounted to the chamber wall with a non-rigid connection wherein the drive unit has at least one degree of freedom of movement relative to the chamber wall wherein the drive unit can follow wobbling motion of the rotary cathode.
27 . The vacuum-coating machine according to claim 26 , wherein the drive unit is mounted to the chamber wall by an intermediate member, the intermediate member formed from an elastomer material.
28 . The vacuum-coating machine according to claim 27 , wherein the drive unit is mounted to the intermediate member and the intermediate member is mounted to the chamber wall wherein the drive unit has at least two degrees of freedom of movement relative to the chamber wall.
29 . The vacuum-coating machine according to claim 27 , further comprising a support, wherein the drive unit is coupled to one end of the rotary cathode, the support providing a rigid support for the other end of the rotary cathode.
30 . The vacuum-coating machine according to claim 29 , wherein the chamber wall has an opening, the rotary cathode having a range of wobbling motion, the drive unit driving the rotary cathode through the opening, wherein the opening is sized greater than the range of wobbling motion of the rotary cathode.