Semiconductor device and manufacturing method of the same
View Patent ↗An object of the present invention is to simplify manufacturing process of an n channel MIS transistor and a p channel MIS transistor with gate electrodes formed of a metal material. For its achievement, gate electrodes of each of the n channel MIS transistor and the p channel MIS transistor are simultaneously formed by patterning ruthenium film deposited on a gate insulator. Next, by introducing oxygen into each of the gate electrodes, the gate electrodes are transformed into those having high work function. Thereafter, by selectively reducing the gate electrode of the n channel MIS transistor, it is transformed into a gate electrode having low work function.
1. A semiconductor device comprising:
an n channel MIS transistor with a first gate electrode formed in a first region on a main surface of a semiconductor substrate; and
a p channel MIS transistor with a second gate electrode having a work function higher than a work function of said first gate electrode formed in a second region on said main surface,
wherein said first and second gate electrodes are formed of the same metal,
wherein oxygen concentration in said second gate electrode is higher than oxygen concentration in said first gate electrode, and
wherein a hydrogen barrier film is formed over said second gate electrode and is not formed over said first gate electrode.
2. The semiconductor device according to claim 1 , wherein said metal is ruthenium.
3. The semiconductor device according to claim 2 , wherein oxygen concentration in ruthenium which forms said first gate electrode is equal to or lower than 1×10 18 /cm 3 and oxygen concentration in ruthenium which forms said second gate electrode is equal to or higher than 1×10 19 /cm 3 .
4. The semiconductor device according to claim 1 , wherein said metal is iridium.
5. The semiconductor device according to claim 1 , wherein gate insulators below said first and second gate electrodes mainly contain at least one of hafnium oxides selected from a group of Hf—O, Hf—Si—O, Hf—Si—O—N, Hf—Al—O and Hf—Al—O—N.
6. The semiconductor device according to claim 1 , wherein said hydrogen barrier film is formed of an alumina film.