Digital micromirror device and manufacturing method thereof
View Patent ↗Provided is a digital micromirror device (DMD). The DMD includes a first metal line, a second metal line, a third metal line, and a mirror. The first metal line is formed to have a predetermined line width and a predetermined thickness, and the second metal line is formed to have the same width and thickness as the first metal line. The third metal line is formed to have its own predetermined line width and predetermined thickness, and the mirror rotates according to a voltage applied to the first, second and third metal lines to reflect light incident thereto.
1. A DMD (digital micromirror device) comprising:
a first metal line having a predetermined line width and a predetermined thickness;
a second metal line formed above the first metal line and having the same line width and thickness as the first metal line;
a third metal line formed above the second metal line and having a second predetermined line width and a second predetermined thickness; and
a mirror capable of rotating according to a voltage applied to the first, second, and third metal lines to reflect light incident thereto.
2. The DMD according to claim 1 , further comprising:
a first interlayer insulating layer having a third predetermined thickness and formed between the first and second metal lines; and
a second interlayer insulating layer having a fourth predetermined thickness and formed between the second and third metal lines.
3. The DMD according to claim 2 , wherein the first interlayer insulating layer has a thickness of 10,500 ±800 Å.
4. The DMD according to claim 2 , wherein the second interlayer insulating layer has a thickness of 10,500 ±800 Å.
5. The DMD according to claim 2 , further comprising an arc hole formed for electric connection on each of the first, second, and third metal lines.
6. The DMD according to claim 5 , wherein the arc hole has a thickness of 700 ±35 Å.
7. The DMD according to claim 1 , wherein the first metal line has a line width of 0.6±0.06 μm and a thickness of 600 ±25 Å.
8. The DMD according to claim 1 , wherein the third metal line has a line width of 0.8 ±0.1 μm and a thickness of 600 ±25 Å.
9. The DMD according to claim 1 , wherein the second and third metal lines comprise a TiN-based metal.
10. A method for manufacturing a DMD, the method comprising:
forming a first metal line having a predetermined line width and a predetermined thickness;
forming a second metal line above the first metal line and having the same line width and thickness as the first metal line;
forming a third metal line above the second metal line and having a second predetermined line width and a second predetermined thickness; and
providing a mirror for reflecting light incident thereto and capable of rotating according to a voltage applied to the first to third metal lines.
11. The method according to claim 10 , further comprising forming a first interlayer insulating layer having a third predetermined thickness between the first and second metal lines, and a second interlayer insulating layer having a fourth predetermined thickness between the second and third metal lines.
12. The method according to claim 11 , wherein the first interlayer insulating layer has a thickness of 10,500 ±800 Å.
13. The method according to claim 11 , wherein the second interlayer insulating layer has a thickness of 10,500 ±800 Å.
14. The method according to claim 11 , further comprising forming an arc hole for electric connection on each of the first to third metal lines.
15. The method according to claim 14 , wherein the arc hole has a thickness of 700 ±35 Å.
16. The method according to claim 10 , wherein the first metal line has a line width of 0.6 ±0.06 μm and a thickness of 600 ±25 Å.
17. The method according to claim 10 , wherein the third metal line has a line width of 0.8 ±0.1 μm and a thickness of 600 ±25 Å.
18. The method according to claim 10 , wherein the second and third metal lines comprise a TiN-based metal.