SAW temperature sensor and system
View Patent ↗A temperature measurement system is characterized by at least one passive surface acoustic wave (SAW) temperature sensor. The sensor includes at least one piezoelectric substrate having an interdigital SAW transducer disposed upon the piezoelectric substrate for conversion of an RF signal into an acoustic wave and vice versa. At least three additional SAW elements are also disposed on the substrates in a manner such that they define two acoustic propagation paths that are non-parallel relative to the crystal axes of the substrates, and such that the temperature coefficients of delay in the two tracks differ. The SAW elements receive a signal from the SAW transducer and produce response signals. The response signals combine to produce a signal with a power spectral density such that the integrated power within each of two specified portions of the spectrum provides an indicator of the temperature. This change in the power spectral density of the sensor response signal is measured by an interrogator, and yields a measure of the temperature of the sensor.
1. A temperature sensor, comprising
(a) at least one piezoelectric substrate;
(b) a first SAW element comprising a transducer formed on a region of said at least one piezoelectric substrate for transducing a signal;
(c) at least three additional SAW elements formed on said at least one piezoelectric substrate; and
(d) two acoustic wave propagation paths that are non-parallel relative to the crystal axes of the substrates, defined by the SAW elements and having different temperature coefficients of delay, wherein the responses from the two acoustic tracks are combined to produce a signal with a power spectral density such that integration of power within each of two specified portions of the spectrum provide an indicator of the temperature.
2. A temperature sensor as defined in claim 1 , wherein said three additional SAW elements comprise transducers, and wherein two transducers are contained in each acoustic track.
3. A temperature sensor as defined in claim 1 , wherein said three additional SAW elements comprise one transducer and two reflectors, and wherein one transducer and one reflector are contained in each acoustic track.
4. A temperature sensor as defined in claim 1 , wherein said three additional SAW elements comprise reflectors.
5. A temperature sensing system comprising:
(a) at least one temperature sensor comprising
(i) at least one piezoelectric substrate;
(ii) a first SAW element comprising a transducer formed on a region of said at least one piezoelectric substrate for transducing a signal;
(iii) at least three additional SAW elements formed on said piezoelectric substrate; and
(iv) two acoustic wave propagation paths that are non-parallel relative to the crystal axes of the substrates, defined by the SAW elements and having different temperature coefficients of delay, wherein the responses from the two acoustic tracks are combined to produce a signal with a power spectral density such that integration of power within each of two specified portions of the spectrum provide an indicator of the temperature; and
(b) an interrogator which transmits an interrogating signal to said at least one temperature sensor and receives the response signal from said at least one temperature sensor and, said interrogator including
(i) a voltage source for providing the interrogating signal;
(ii) a communicating device for transmitting the interrogating signal to said at least one temperature sensor and and for receiving the response signal therefrom; and
(iii) a signal processor for calculating the integrated power within each of said two portions of the frequency spectrum to produce a metric corresponding to the temperature.