Process for making a semiconductor device having a roughened surface
View Patent ↗An oxide film formed on the surface of copper film of an electrode pad is cleaned by oxalic acid after unevenness is formed on the surface of copper film by treating the surface with organic acid. Thereby, stable resistance is obtained when carrying out a characteristic inspection by bringing a probe into contact with the electrode pad, and it is easily recognized by observation through a microscope that the probe is brought into contact with the electrode pad. In addition, wettability with respect to solder is satisfactory, and it is possible to favorably form a solder bump on the electrode pad.
1. A method for producing a semiconductor device, comprising the steps of:
forming a wiring layer on a semiconductor substrate;
forming an electrode pad for inspection on said wiring layer, said electrode pad having unevenness on the surface thereof;
removing an oxide film formed on the surface of said electrode pad for inspection, having unevenness on the surface thereof, by a cleaning solution containing carboxylic acid or its salt;
conducting a characteristic inspection by bringing a probe needle into contact with the surface after removing the oxide film; and
soldering on the surface after conducting the characteristic inspection.
2. The method for producing a semiconductor device as set forth in claim 1 , wherein the forming of an electrode pad for inspection includes the steps of:
forming a metal film on said wiring layer; and
wet-treating the surface of said metal film using a chemical solution containing acid.
3. The method for producing a semiconductor device as set forth in claim 1 , wherein the surface roughness Ra of said electrode pad for inspection is 0.01 μm or more and 0.15 μm or less.
4. The method for producing a semiconductor device as set forth in claim 1 , further comprising a step of treating the surface of said electrode pad for inspection, which has unevenness on the surface thereof and from which the oxide film is removed, with an anticorrosive agent and thereafter conducting a characteristic inspection by bringing a probe needle into contact with the surface of the electrode pad for inspection.
5. The method for producing a semiconductor device as set forth in claim 1 , wherein said carboxylic acid is polyvalence carboxylic acid.
6. The method for producing a semiconductor device as set forth in claim 5 , wherein said polyvalence carboxylic acid includes at least one selected from a group consisting of oxalic acid, citric acid, malic acid, maleic acid, succinic acid, tartaric acid, and malonic acid.
7. The method for producing a semiconductor device as set forth in claim 1 , wherein the forming of an electrode pad for inspection includes the steps of:
forming a barrier metal layer on said wiring layer;
forming a contact layer on said barrier metal layer; and
wet-treating the surface of said contact layer using a chemical solution containing acid.
8. The method for producing a semiconductor device as set forth in claim 7 , wherein said barrier metal layer is formed of nickel or nickel alloy.
9. The method for producing a semiconductor device as set forth in claim 7 , wherein said contact layer is formed of copper or copper alloy.