Semiconductor device protective structure and method for fabricating the same
View Patent ↗The present invention provides a semiconductor device protective structure. The structure comprises a die with contact metal balls formed thereon electrically coupling with a print circuit board. A back surface of the die is directly adhered on a substrate and a first buffer layer is formed on the substrate. The substrate is configured over a second buffer layer such that the second buffer layer substantially encompasses the whole substrate to decrease damage to the substrate when the side of the substrate is collided with an external object.
1. A method for manufacturing a semiconductor device protective structure, comprising:
providing a plurality of dice with a plurality of conductive balls formed thereon;
adhering said plurality of dice over a substrate;
forming a first buffer layer over said substrate and adjacent to said dice to expose said plurality of conductive balls;
removing a partial of said substrate to form a plurality of slots and substantially aligned to said first buffer layer; and
forming a second buffer layer over said substrate and filled with said plurality of slots.
2. The method in claim 1 , wherein said substrate comprises silicon wafer, glass, alloy 42 , quartz or ceramic.
3. The method in claim 1 , wherein the material of said first buffer layer and said second buffer layer comprise silicone rubber BCB, SINR (Siloxane polymer), epoxy, polyimides or resin.
4. The method in claim 1 , wherein said step of removing a partial of said substrate is performed by sawing or etching.
5. The method in claim 1 , further comprising a step of sawing or etching said substrate along about the substantially center of said slots into a plurality of individual semiconductor devices protective structure.
6. The method in claim 1 , wherein said slots includes slope sidewall slots.
7. The method in claim 6 , wherein a depth of said slop sidewall slot is substantially the same with a thickness of said substrate.
8. A method for manufacturing a semiconductor device protective structure, comprising:
providing a substrate having a plurality of dice with a plurality of conductive balls formed thereon;
removing a backside surface of partial said substrate to form a plurality of slots; and
forming a buffer layer over said substrate and filled within said plurality of slots.
9. The method in claim 8 , wherein said substrate comprises silicon wafer.
10. The method in claim 8 , wherein the material of said buffer layer comprises silicone rubber BCB, SINR (Siloxane polymer), epoxy, polyimides or resin.
11. The method in claim 8 , wherein said step of removing said backside surface of partial said substrate is performed by sawing or etching.
12. The method in claim 8 , further comprising a step of sawing or etching said substrate along about the substantially center of said slots into a plurality of individual semiconductor devices protective structure.