Semiconductor device and manufacturing method thereof
View Patent ↗A semiconductor device has a multi-layer wiring in which resistance against migration of the semiconductor device is raised to improve the yield. Semiconductor device 100 includes a first interconnect (wiring) 112 , formed in a first interlayer insulating film 106 on a semiconductor substrate, not shown, a via 128 provided on the first interconnect (wiring) 112 so that the via is connected to the first interconnect (wiring) 112 , and a different element containing electrically conductive film 114 . The different element containing electrically conductive film is formed selectively on a site on the top of the first interconnect (wiring) 112 where the first wiring is contacted with the bottom of the via 128 . The different element containing electrically conductive film contains a metal of a main component of the first interconnect (wiring) 112 and a different element different from the metal of the main component.
1. A semiconductor device comprising:
a semiconductor substrate;
a wiring provided in an insulating film formed on said semiconductor substrate and containing a first material as a main component, wherein said first material is a metal;
a via connecting plug formed above said wiring; and
a connecting portion selectively formed in an upper portion of said wiring and connected to the via connecting plug, said connecting portion comprising an electrically conductive film including a second material, different from said first material,
wherein said second material of said electrically conductive film contains said first material and a third material, where said third material is selected from the group consisting of at least one of silicon and a metal different from said first material, and
wherein said wiring is free from said second material.
2. The semiconductor device according to claim 1 , wherein said first material is copper.
3. The semiconductor device according to claim 1 , wherein said electrically conductive film is a silicide layer of said first material.
4. The semiconductor device according to claim 1 , wherein there is formed, in an area on the top of said wiring other than the area where said connecting portion has been formed, a film formed of a material different from the second material, and having a function of preventing diffusion of said first material.
5. A method for manufacturing a semiconductor device comprising:
forming a wiring on a semiconductor substrate, the wiring containing a first material as a main component, wherein the first material is a metal;
forming an insulating film covering said wiring;
selectively removing said insulating film to form a via hole reaching the upper surface of said wiring;
selectively forming a connecting portion in an upper portion of said wiring which is formed of an electrically conductive film containing said first material and a second material different from the first material, wherein said second material is selected from the group consisting of at least one of silicon and a third material, wherein said third material is a metal different from said first material, so as to provide said connecting portion in said upper surface portion of said wiring through said via hole; and
filling an inner space of said via hole with a metal material to form a via connecting plug to connect said wiring to said via connecting plug through said connecting portion,
wherein said wiring is free from said second material.
6. The method for manufacturing a semiconductor device according to claim 5 , wherein
in said forming said electrically conductive film, the exposed portion of the upper surface of said wiring is selectively silicided to form a layer of a silicide of said first material.
7. The method for manufacturing a semiconductor device according to claim 5 , wherein
the first material is copper; and
wherein in said forming said electrically conductive film, the exposed portion of an upper surface of said wiring is selectively silicided to form a copper silicide layer.
8. The method for manufacturing a semiconductor device according to claim 6 , wherein said forming said electrically conductive film includes:
directing a Si-containing gas to said exposed portion of the upper surface of said wiring.
9. The method for manufacturing a semiconductor device according to claim 6 , wherein said siliciding includes:
implanting Si on said exposed portion of an upper surface of said wiring; and
a heat-treatment step.
10. The method for manufacturing a semiconductor device according to claim 5 , wherein said insulating film forming includes:
forming a film of a material different from the second material of said electrically conductive film and having a function of preventing diffusion of said metal of the main component; and
forming an interlayer insulating film on said film having the diffusion preventive function;
said film having the diffusion preventive function and said interlayer insulating film being selectively removed in said via hole forming to form said via hole.