Side light emitting type semiconductor laser diode having dielectric layer formed on active layer
View Patent ↗Provided is a side light emitting type semiconductor laser diode in which a dielectric layer is formed on an active layer. The side light emitting type semiconductor laser diode includes an n-clad layer, an n-light guide layer, an active layer and a p-light guide layer sequentially formed on a substrate, and a dielectric layer with a ridge structure formed on the p-light guide layer.
1. A side light emitting type semiconductor laser diode comprising:
a substrate;
an n-clad layer disposed on the substrate;
an n-light guide layer disposed on the n-clad layer;
an active layer disposed on the n-light guide layer;
a p-light guide layer disposed on the active layer; and
a dielectric layer with a ridge structure disposed directly on the p-light guide layer,
wherein the p-light guide layer and the dielectric layer are sequentially disposed on the active layer, and
wherein the dielectric layer is located directly above a light mode generation region of the active layer.
2. A side light emitting type semiconductor laser diode comprising:
a substrate;
an n-clad layer disposed on the substrate;
an n-light guide layer disposed on the n-clad layer;
an active layer disposed on the n-light guide layer;
a p-light guide layer disposed on the active layer;
a p-contact layer directly disposed on the p-light guide layer; and
a dielectric layer with a ridge structure directly disposed on the p-contact layer.
3. The side light emitting type semiconductor laser diode of claim 2 , further comprising a p-electrode layer disposed on sides of the dielectric layer.
4. The side light emitting type semiconductor laser diode of claim 1 , further comprising:
an n-semiconductor layer interposed between the substrate and the n-clad layer; and
an n-electrode layer disposed on one portion of the n-semiconductor layer.
5. The side light emitting type semiconductor laser diode of claim 1 , wherein the n-clad layer is formed of Al x GaN (x≧0).
6. The side light emitting type semiconductor laser diode of claim 1 , wherein the n-light guide layer is formed of In x GaN (x≧0).
7. The side light emitting type semiconductor laser diode of claim 1 , wherein the active layer has a Multi Quantum Wall (MQW) structure formed of In x GaN (x≧0).
8. The side light emitting type semiconductor laser diode of claim 1 , wherein the p-light guide layer is formed of In x GaN (x≧0).
9. The side light emitting type semiconductor laser diode of claim 1 , wherein the dielectric layer includes at least one material selected from the group consisting of Si0 2 , SiN x , HfOx, AIN, Al 2 O 3 , TiO 2 , ZrO 2 , MnO, and Ta 2 0 5 .
10. The side light emitting type semiconductor laser diode of claim 2 , wherein the p-contact layer is formed of In x GaN (x≧0).