Positive tone bi-layer imprint lithography method
View Patent ↗The present invention provides a method to pattern a substrate which features creating a multi-layered structure by forming, on the substrate, a patterned layer having protrusions and recessions. Formed upon the patterned layer is a conformal layer, with the multi-layered structure having a crown surface facing away from the substrate. Portions of the multi-layered structure are removed to expose regions of the substrate in superimposition with the protrusions, while forming a hard mask in areas of the crown surface in superimposition with the recessions.
1. A method of patterning a substrate, said method comprising:
creating a multi-layered structure by forming, on said substrate, a patterned layer from a material having a polymerizable compound and a surfactant having a surface energy that is less than a surface energy of said polymerizable compound, with said patterned layer having protrusions and recessions, and forming, upon said patterned layer, a conformal layer, with said multi-layered structure having a crown surface facing away from said substrate, said patterned layer having a first thickness in superimposition with said recessions and having a second thickness, differing from said first thickness, in superimposition with said protrusions, with said first and second thicknesses being greater than zero; and
selectively removing portions of said multi-layered structure to expose regions of said substrate in superimposition with said protrusions while forming a hard mask in areas of said crown surface in superimposition with said recessions.
2. The method as recited in claim 1 wherein forming said patterned layer further includes providing said protrusions with an apex and a height and forming said conformal layer further includes providing said conformal layer with a normalization surface spaced-apart from one apex a minimum distance and spaced-apart from an additional apex a maximum distance with said height being greater than a difference between said maximum distance and said minimum distance.
3. The method as recited in claim 1 wherein creating further includes forming said patterned layer from said organic polymerizable material substantially free of silicon and forming said conformal layer from a silicon-containing polymerizable material.
4. The method as recited in claim 1 wherein creating further includes forming said conformal layer from a material having a polymerizable compound and a surfactant having a surface energy that is lower than a surface energy of said polymerizable material.
5. The method as recited in claim 1 wherein creating further includes forming said conformal layer by disposing, on said substrate, a polymerizable fluid composition and contacting said polymerizable fluid composition with a mold having a substantially planar surface and subjecting said polymerizable fluid composition to conditions to polymerize said polymerizable fluid composition.
6. The method as recited in claim 1 wherein forming said conformal layer further includes spin-coating a polymerizable fluid on said patterned layer.
7. The method as recited in claim 1 further including depositing a primer layer between said patterned layer and said substrate.
8. The method as recited in claim 1 wherein creating further includes forming said conformal layer with a section having a normalization surface disposed opposite to said patterned layer and spaced-apart from said protrusions, and further including removing portions of said section to expose said protrusions, defining said crown surface and exposing said crown surface to an etch chemistry.
9. The method as recited in claim 8 wherein removing portions further includes subjecting said normalization surface to a blanket etch and exposing said crown surface further includes subjecting said crown surface to an anisotropic plasma etch.
10. A method of patterning a substrate, said method comprising:
creating a multi-layered structure by forming, on said substrate, a patterned layer having protrusions and recessions, and forming, upon said patterned layer, a conformal layer from a material having a polymerizable compound and a surfactant having a surface energy that is lower than a surface energy of said polymerizable compound, with said multi-layered structure having a crown surface facing away from said substrate, said patterned layer having a first thickness in superimposition with said recessions and having a second thickness, differing from said first thickness, in superimposition with said protrusions, with said first and second thicknesses being greater than zero; and
selectively removing portions of said multi-layered structure to expose regions of said substrate in superimposition with said protrusions while forming a hard mask in areas of said crown surface in superimposition with said recessions.
11. The method as recited in claim 10 wherein forming said patterned layer further includes providing said protrusions with an apex and a height and forming said conformal layer further includes providing said conformal layer with a normalization surface spaced-apart from one apex a minimum distance and spaced-apart from an additional apex a maximum distance with said height being greater than a difference between said maximum distance and said minimum distance.
12. The method as recited in claim 10 wherein creating further includes forming said patterned layer from said organic polymerizable material substantially free of silicon and forming said conformal layer from a silicon-containing polymerizable material.
13. The method as recited in claim 10 wherein creating further includes forming said conformal layer from a material having a polymerizable compound and a surfactant having a surface energy that is lower than a surface energy of said polymerizable material.
14. The method as recited in claim 10 wherein creating further includes forming said conformal layer by disposing, on said substrate, a polymerizable fluid composition and contacting said polymerizable fluid composition with a mold having a substantially planar surface and subjecting said polymerizable fluid composition to conditions to polymerize said polymerizable fluid composition.
15. The method as recited in claim 10 wherein forming said conformal layer further includes spin-coating a polymerizable fluid on said patterned layer.
16. The method as recited in claim 10 further including depositing a primer layer between said patterned layer and said substrate.
17. The method as recited in claim 10 wherein creating further includes forming said conformal layer with a section having a normalization surface disposed opposite to said patterned layer and spaced-apart from said protrusions, and farther including removing portions of said section to expose said protrusions, defining said crown surface and exposing said crown surface to an etch chemistry.
18. A method of patterning a substrate, said method comprising:
creating a multi-layered structure by forming, on said substrate, a patterned layer having protrusions and recessions, by disposing, on said substrate, a polymerizable fluid composition and contacting said polymerizable fluid composition with a surface of a mold, and subjecting said polymerizable fluid composition to conditions to polymerize said polymerizable fluid composition, forming said patterned layer, and forming, upon said patterned layer, a conformal layer, with said multi-layered structure having a crown surface facing away from said substrate, said patterned layer having a first thickness in superimposition with said recessions and having a second thickness, differing from said first thickness, in superimposition with said protrusions, with said first and second thicknesses being greater than zero; and
selectively removing portions of said multi-layered structure to expose regions of said substrate in superimposition with said protrusions while forming a hard mask in areas of said crown surface in superimposition with said recessions.
19. The method as recited in claim 18 wherein forming said patterned layer further includes providing said protrusions with an apex and a height and forming said conformal layer further includes providing said conformal layer with a normalization surface spaced-apart from one apex a minimum distance and spaced-apart from an additional apex a maximum distance with said height being greater than a difference between said maximum distance and said minimum distance.
20. The method as recited in claim 18 wherein creating further includes forming said patterned layer from said organic polymerizable material substantially free of silicon and forming said conformal layer from a silicon-containing polymerizable material.