Anisotropic conductive connector and inspection equipment for circuit device

1. An anisotropically conductive connector device comprising a first anisotropically conductive sheet and a second anisotropically conductive sheet, in which a plurality of conductive path-forming parts each extending in a thickness-wise direction of each sheet are arranged in a state mutually insulated by an insulating part wherein the conductive path-forming parts in the second anisotopically conductive sheet each have a diameter smaller than a diameter of each of the conductive path-forming parts in the first anisotropically conductive sheet, wherein a sheet connector composed of an insulating sheet and a plurality of electrode structures, each structure extending through in a thickness-wise direction of the insulating sheet, the insulating sheet provided between the anisotropically conductive sheets for electrically connecting the first anisotropically conductive sheet to the second anisotropically conductive sheet; wherein in each of the electrode structures in the sheet connector, a front-surface electrode part exposed to the front surface of the insulating sheet and a back-surface electrode part exposed to the back surface of the insulating sheet are connected to each other through a short circuit part extending through in the thickness-wise direction of the insulating sheet.

2. The anisotropically conductive connector device according to claim 1 , wherein the first anisotropically conductive sheet and the second anisotropically conductive sheet are each formed by an elastic polymeric substance as a whole, and conductive particles exhibiting magnetism are contained in the conductive path-forming parts thereof.

3. The anisotropically conductive connector device according to claim 1 , wherein a ratio of the diameter of each conductive path-forming part in the second anisotropically conductive sheet to the diameter of each conductive path-forming part in the first anisotropically conductive sheet is 0.3 to 0.9.

4. The anisotropically conductive connector device according to claim 1 , wherein a support for supporting the peripheral edge portion of each of the first anisotropically conducive sheet and second anisotropically conductive sheet is provided at the peripheral edge portion.

5. The anisotropically conductive connector device according to claim 1 , which is an anisotropically conductive connector device for conducting electrical connection between electrodes to be inspected of a circuit device, which is an object of inspection, and inspection electrodes of a circuit board for inspection by intervening between the circuit device and the circuit board for inspection, and wherein the first anisotropically conductive sheet is brought into contact with the circuit device which is an object of inspection.

6. An inspection apparatus for circuit boards, comprising:

a circuit device for inspection having inspection electrodes arranged corresponding to electrodes to be inspected of a circuit device, which is an object of inspection, and

the anisotropically conductive connector device according to claim 5 , which is arranged on the circuit board for inspection.

7. An anisotropically conductive connector device comprising a sheet-like connector composed of an insulating sheet and a plurality of electrode structures each extending through in a thickness-wise direction of the insulating sheet, a first anisotropically conductive sheet provided on the front surface of the sheet-like connector and a second anisotropically conductive sheet provided on the front surface of the sheet-like connector, wherein

in each of the electrode structures in the sheet-like connector, a front-surface electrode part exposed to the front surface of the insulating sheet and a back-surface electrode part exposed to the back surface of the insulating sheet are connected to each other through a short circuit part extending through in the thickness-wise direction of the insulating sheet,

the first anisotropically conductive sheet is composed of a plurality of conductive path-forming parts, which are arranged in accordance with a pattern corresponding to the electrode structures in the sheet-like connector and extend in a thickness-wise direction of the anisotropically conductive sheet, and an insulating part mutually insulating these conductive path-forming parts, and is arranged in such a manner that the conductive path-forming parts are respectively located on the front-surface electrode parts of heir corresponding electrode structures,

the second anisotropically conductive sheet is composed of a plurality of conductive path-forming parts, which are arranged in accordance with a pattern corresponding to the electrode structures in the sheet-like connector and each extend in a thickness-wise direction of the anisotropically conductive sheet, and an insulating part mutually insulating these conductive path-forming parts, and is arranged in such a manner that the conductive path-forming parts are respectively located on the back-surface electrode parts of their corresponding electrode structures, and

the conductive path-forming parts in the second anisotropically conductive sheet each have a diameter smaller than a diameter of each of the conductive pathforming parts in the first anisotropically conductive sheet.