Image sensor for reduced dark current
View Patent ↗A method and structure for reducing dark current in an image sensor includes preventing unwanted electrons from being collected in the photosensitive region of the image sensor. In one embodiment, dark current is reduced by providing a deep n-type region having an n-type peripheral sidewall formed in a p-type substrate region underlying a pixel array region to separate the pixel array region from a peripheral circuitry region of the image sensor. The method and structure also provide improved protection from blooming.
1. A structure for isolating areas in a semiconductor device comprising:
a substrate comprising a pixel array region and a peripheral circuit region, said pixel array region comprising a plurality of image sensor pixels;
an n-type structure formed in said substrate, said n-type structure comprising: an n-type region, said n-type region being sandwiched between a first p-type region of said substrate and a second p-type region of said substrate and said n-type region extending at least beneath said pixel array region; and ann-type sidewall implant extending to and in electrical communication with said n-type region only outside of said pixel array region; wherein said n-type structure defines a p-type area situated in said pixel array region which is isolated from said peripheral circuit region; and
at least one p-type implant for contacting said p-type area situated between said n-type sidewall implant and said pixel array region.
2. The structure of claim 1 wherein said sidewall is a contiguous structure.
3. The structure of claim 1 wherein said p-type implant is a contiguous wall implant.