Apparatus and method for cleaning semiconductor wafer
View Patent ↗Method and apparatus for precisely removing dusts from a side edge of a wafer, improving a production yield of wafers, and reducing a manufacturing cost for semiconductor devices. The apparatus includes: a retaining table having a circular top plan view, capable of retaining the wafer disposed on the top surface, and being rotated in the wafer cleaning; a feeding unit for supplying a cleaning solution to a top surface of the wafer; a cup member for recovering the cleaning solution supplied to the wafer, the cup member surrounding a radially outer circumference and a bottom of the retaining table; and a guard member disposed inside the cup member so as to be spaced apart from the retaining table, which surrounds the radially outer circumference of the retaining table.
1. An apparatus for cleaning a semiconductor wafer, comprising:
a retaining table having a circular top plan view, said retaining table being capable of retaining a wafer disposed on the top surface thereof and being capable of rotating during cleaning the wafer;
a supply unit for supplying a cleaning solution to the top surface of said wafer disposed on said retaining table;
a cup member for recovering said cleaning solution supplied to said wafer by said supply unit, said cup member surrounding a radially outer circumference and a bottom of said retaining table;
a guard member, being disposed in an inside of said cup member and being spaced apart from said retaining table, said guard member surrounding the radially outer circumference of said retaining table, and
a gating unit, which provides opening and closing of said flowing passage;
wherein said retaining table retains the wafer so that the side edge of the retaining table and the side edge of the wafer form a common surface,
wherein the side edges of said wafer and said retaining table and an inner surface of said guard member define a flowing passage, which is capable of being substantially fulfilled with said cleaning solution during the cleaning of the wafer; and
wherein said gating unit provides opening and closing of said flowing passage by moving said guard member toward a radial direction.
2. The apparatus for cleaning the semiconductor wafer according to claim 1 , wherein a distance between the side edges of said wafer and said retaining table and the inner surface of said guard member is within a range of from 3 mm to 10 mm.
3. The apparatus for cleaning the semiconductor wafer according to claim 1 , wherein the apparatus is configured that, before commencing the cleaning of said wafer, said cleaning solution is supplied to the top surface of said wafer by said supply unit while said flowing passage is closed, and once the cleaning of said wafer is commenced, said flowing passage is opened.
4. The apparatus for cleaning the semiconductor wafer according to claim 1 , wherein said guard member includes: a passage defining portion defining a wall of said flowing passage and extending in vertical direction; and a flange portion extending from the upper end of said passage defining portion in obliquely upward direction inclining toward a radially inward direction.
5. A method for cleaning a semiconductor wafer, by employing an apparatus for cleaning a semiconductor wafer, said apparatus comprising:
a retaining table having a circular top plan view, said retaining table being capable of retaining a wafer disposed on the top surface thereof and being capable of rotating during cleaning the wafer;
a supply unit for supplying a cleaning solution to the top surface of said wafer disposed on said retaining table;
a cup member for recovering said cleaning solution supplied to said wafer by said supply unit, said cup member surrounding a radially outer circumference and a bottom of said retaining table;
a guard member, being disposed in an inside of said cup member and being spaced apart from said retaining table, said guard member surrounding the radially outer circumference of said retaining table, and
a gating unit, which provides opening and closing of said flowing passage;
wherein said gating unit provides opening and closing of said flowing passage by moving said guard member toward a radial direction, said method comprising:
defining a flowing passage with the side edges of said wafer and said retaining table and an inner surface of said guard member, while retaining said wafer so that the side edge of the retaining table and the side edge of the wafer form a common surface; and
flowing a cleaning solution by supplying said cleaning solution to a top surface of said wafer while rotating said retaining table together with the wafer, thereby flowing into the flowing passage said cleaning solution, which moves in the top surface of said wafer toward the radially outer circumference, so that said flowing passage is substantially filled with said cleaning solution.
6. The method for cleaning the semiconductor wafer according to claim 5 , further comprising: charging the cleaning solution by closing said flowing passage while stopping the rotation of said retaining table and supplying said cleaning solution to the top surface of said wafer, before said flowing the cleaning solution,
wherein, in said flowing the cleaning solution, said flowing passage is opened, and said cleaning solution is supplied to the top surface of said wafer while rotating said retaining table.