IP Library › Granted Patent US 7,452,488
Granted Patent B2
US 7,452,488 · App. 11/590,179 · Granted Nov 18, 2008

Tin oxide-based sputtering target, low resistivity, transparent conductive film, method for producing such film and composition for use therein

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Quick Facts
Patent No.
US 7,452,488
App. No.
11/590,179
Granted
Nov 18, 2008
Kind
B2
Abstract

The present invention is directed to a composition consisting essentially of: a) from about 60 to about 99 mole % of SnO 2 , and b) from about 1 to about 40 mole % of one or more materials selected from the group consisting of i) Nb 2 O 5 , ii) NbO, iii) NbO 2 , iv) WO 2 , v) a material selected consisting of a) a mixture of MoO 2 and Mo and b) Mo, vi) W, vii) Ta 2 O 5 , and viii) mixtures thereof, wherein the mole % s are based on the total product and wherein the sum of components a) and b) is 100. The invention is also directed to the sintered product of such composition, a sputtering target made from the sintered product and a transparent electroconductive film made from the composition.

Claims (9)

1. A composition consisting essentially of: a) from about 60 to about 99 mole % of SnO 2 and b) from about 1 to about 40 mole % of a mixture of MO 2 and Mo wherein the mole % is based on the total product and wherein the sum of components a) and b) is 100.

2. The composition of claim 1 , consisting essentially of a) from about 90 to about 99 mole % of SnO 2 and b) from about 1 to about 10 mole % of the component b).

3. The composition of claim 2 , wherein component b) consists of a combination of MoO 2 and Mo, with the ratio of moles of MoO 2 to moles of moles of Mo is from about 100:1 to about 1:100.

4. The composition of claim 3 , wherein the ratio of moles of MoO 2 to moles of Mo is from about 10:1 to about 1:10.

5. A sintered product prepared by sintering the composition of claim 1 .

6. A sputtering target comprising the product prepared by sintering the composition of claim 1 .

7. A transparent electroconductive film prepared by forming on the surface of a substrate, a transparent electroconductive layer of a composition consisting essentially of the composition of claim 1 .

8. A sintered product prepared by sintering the composition of claim 2 .

9. A sputtering target comprising the product prepared by sintering the composition of claim 2 .

Assignments (16)
CHANGE OF NAME Recorded Apr 5, 2022
From: H.C. STARCK INC.
To: MATERION NEWTON INC.
Reel/Frame 059596/0925 →
RELEASE OF SECURITY INTEREST Recorded Nov 2, 2021
From: GLAS TRUST CORPORATION LIMITED
To: H.C. STARCK INC.
Reel/Frame 058768/0827 →
RELEASE OF SECURITY INTEREST Recorded Nov 2, 2021
From: GLAS TRUST CORPORATION LIMITED
To: H.C. STARCK INC.
Reel/Frame 058769/0242 →
RELEASE OF SECURITY INTEREST Recorded Nov 1, 2021
From: GLAS TRUST CORPORATION LIMITED
To: H.C. STARCK INC.
Reel/Frame 057986/0378 →
RELEASE OF SECURITY INTEREST Recorded Nov 1, 2021
From: GLAS TRUST CORPORATION LIMITED
To: H.C. STARCK INC.
Reel/Frame 057986/0362 →
RELEASE OF SECURITY INTEREST Recorded Nov 1, 2021
From: GLAS TRUST CORPORATION LIMITED
To: H.C. STARCK INC.
Reel/Frame 057986/0057 →
SECURITY INTEREST Recorded Nov 1, 2021
From: H.C. STARCK INC.
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 057978/0970 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 8, 2016
From: COMMERZBANK AKTIENGESELLSCHAFT, FILIALE LUXEMBOURG, AS SECURITY AGENT FOR THE BENEFIT OF MEZZANINE SECURED PARTIES
To: GLAS TRUST CORPORATION LIMITED
Reel/Frame 039370/0697 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 8, 2016
From: COMMERZBANK AKTIENGESELLSCHAFT, FILIALE LUXEMBOURG, AS SECURITY AGENT FOR THE BENEFIT OF SECOND LIEN SECURED PARTIES
To: GLAS TRUST CORPORATION LIMITED
Reel/Frame 039370/0863 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 8, 2016
From: COMMERZBANK AKTIENGESELLSCHAFT, FILIALE LUXEMBOURG, AS SECURITY AGENT FOR THE BENEFIT OF SENIOR SECURED PARTIES
To: GLAS TRUST CORPORATION LIMITED
Reel/Frame 039370/0742 →
SECURITY INTEREST Recorded Mar 31, 2016
From: H.C. STARCK INC.
To: GLAS TRUST CORPORATION LIMITED, AS SECURITY AGENT FOR THE BENEFIT OF THE SECOND LIEN SECURED PARTIES
Reel/Frame 038311/0472 →
SECURITY INTEREST Recorded Mar 31, 2016
From: H.C. STARCK INC.
To: GLAS TRUST CORPORATION LIMITED, AS SECURITY AGENT FOR THE BENEFIT OF THE SENIOR SECURED PARTIES
Reel/Frame 038311/0460 →
SECURITY AGREEMENT Recorded Jul 5, 2012
From: H.C. STARCK INC.
To: COMMERZBANKAG, FILIALE LUXEMBURG, AS SECURITY AGENT FOR THE BENEFIT OF THE SENIOR SECURED PARTIES
Reel/Frame 028503/0167 →
SECURITY AGREEMENT Recorded Jul 5, 2012
From: H.C. STARCK INC.
To: COMMERZBANK AG, FILIALE LUXEMBURG, AS SECURITY AGENT FOR THE BENEFIT OF THE MEZZANINE SECURED PARTIES
Reel/Frame 028503/0188 →
SECURITY AGREEMENT Recorded Jul 5, 2012
From: H.C. STARCK INC.
To: COMMERZBANK AG, FILIALE LUXEMBURG, AS SECURITY AGENT FOR THE BENEFIT OF THE SECOND LIEN SECURED PARTIES
Reel/Frame 028503/0196 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 31, 2006
From: KUMAR, PRABHAT; WU, RONG-CHEIN RICHARD; SUN, SHUWEI
To: H. C. STARCK INC.
Reel/Frame 018485/0654 →