Semiconductor light emitting diode and method for manufacturing the same
View Patent ↗A high-efficiency semiconductor light emitting diode and a method for manufacturing the same are provided. The semiconductor LED has high internal quantum efficiency and can reduce the bad effect caused by the crystal defect. In the semiconductor light emitting diode, a conductive substrate has a three-dimensional top surface, and a light-emitting stack structure has a three-dimensional structure and includes an n-type nitride semiconductor layer, an active layer, and a p-type nitride semiconductor layer, which are sequentially formed on the conductive substrate. A p-electrode is formed on the p-type nitride semiconductor layer, and an n-electrode is formed on a bottom surface of the conductive substrate.
1. A semiconductor light emitting diode comprising:
a conductive substrate having a top surface formed in a three-dimensional shape;
a light-emitting stack structure having a three-dimensional structure which has a top plane and slanted side planes and including an n-type nitride semiconductor layer, an active layer, and a p-type nitride semiconductor layer, which are sequentially formed on the conductive substrate, the active layer extending within planes parallel to the top plane and the slanted planes;
a p-electrode formed on the p-type nitride semiconductor layer, and
an n-electrode formed on a bottom surface of the conductive substrate,
wherein the light-emitting stack structure has cut-out portions at the edges where the top plane of the three-dimensional structure intersects with the slanted side planes.
2. The semiconductor light emitting diode of claim 1 , wherein the conductive substrate is one of a nitride semiconductor substrate and a SiC substrate.
3. The semiconductor light emitting diode of claim 1 , wherein the conductive substrate has a thickness of more than 50 μm.
4. The semiconductor light emitting diode of claim 1 , wherein the three-dimensional structure has a thickness of 10-1000 μm.
5. The semiconductor light emitting diode of claim 1 , wherein the upper surface of the active layer includes at least one of c-plane, a-plane, and n-plane.
6. The semiconductor light emitting diode of claim 1 , further comprising a passivation layer formed at the cut-out portions.
7. The semiconductor light emitting diode of claim 1 , wherein a groove is formed at the bottom surface of the conductive substrate to reduce a thickness deviation of the conductive substrate.
8. The semiconductor light emitting diode of claim 1 , wherein the conductive substrate has an uneven bottom surface to provide a roughness.
9. The semiconductor light emitting diode of claim 1 , wherein the three-dimensional structure is a trapezoidal pyramid structure.
10. The semiconductor light emitting diode of claim 9 , further comprising a passivation layer formed at the cut-out portions.
11. The semiconductor light emitting diode of claim 1 , wherein the p-electrode is selectively formed in regions except the cut-out portions.