Semiconductor package containing multi-layered semiconductor chips
View Patent ↗According to this invention, a semiconductor package includes: a plurality of semiconductor chips, each having through electrodes; and a semiconductor interposer, on which the plurality of semiconductor chips are mounted. Each of the semiconductor chips includes: a semiconductor substrate; a wiring layer formed on the semiconductor substrate; an opaque resin layer sealing the wiring layer and a side surface of the semiconductor chip; and conductive bumps to be connected to the through electrodes.
1. A semiconductor package, comprising:
a semiconductor interposer;
a plurality of semiconductor chips mounted on the semiconductor interposer, each chip having through electrodes,
wherein each of the semiconductor chips includes:
a semiconductor substrate shaped to have a beveling portion at its peripheral corner;
a wiring layer formed on the semiconductor substrate;
an opaque resin layer formed on a surface of the beveling portion, the opaque resin layer sealing the wiring layer; and
conductive bumps to be connected to the through electrodes.
2. A semiconductor package according to claim 1 , wherein:
a side surface of the semiconductor substrate and a side surface of the opaque resin layer continuously abut to each other, and collectively form a side surface of the semiconductor chip; and
the opaque resin layer has a uniform thickness at its entire side surface.
3. A semiconductor package according to claim 1 , wherein the semiconductor chips are memory chips.
4. A semiconductor package according to claim 1 , wherein:
the semiconductor interposer has first and second surfaces, which are opposite to each other;
the plurality of semiconductor chips are mounted on the first surface of the semiconductor interposer;
a plurality of solder terminals are formed on the second surface of the semiconductor interposer; and the plurality of solder terminals are to be connected electrically to a mount board.
5. A semiconductor package according to claim 1 , wherein:
the semiconductor interposer has first and second surfaces, which are opposite to each other;
the plurality of semiconductor chips are mounted on the first surface of the semiconductor interposer;
a plurality of solder terminals are formed on the first surface of the semiconductor interposer;
the plurality of solder terminals are to be connected electrically to a mount board;
the mount board is shaped to have a hollow portion, in which the semiconductor package is contained; and
the semiconductor package is mounted in the hollow portion of the mount board so that the semiconductor interposer faces up.
6. A semiconductor package according to claim 5 , wherein a heat radiating member, having a high thermal conductivity, is arranged between a bottom of the hollow portion and the semiconductor package.
7. A semiconductor package according to claim 6 , wherein the heat radiating member is of a metal resin.
8. The semiconductor package according to claim 1 , further comprising a metal solder disposed between a first one of the semiconductor chips and a second one of the semiconductor chips that is disposed directly under the first semiconductor chip, and wherein:
each conductive bump of the first semiconductor chip penetrates the opaque resin layer in a thickness direction of the opaque resin layer, one end of the bump being connected to the through electrode of the first semiconductor chip, the other end of the bump being connected to a metal solder, the metal solder being connected to the through electrode of the second semiconductor chip.
9. A semiconductor package, comprising:
a semiconductor interposer;
a plurality of semiconductor chips mounted on the semiconductor interposer, each semiconductor chip having through electrodes,
wherein each semiconductor chip includes:
a semiconductor substrate having an upper surface and a side surface;
a wiring layer formed on the upper surface of the semiconductor substrate;
an opaque resin layer covering the upper surface and the side surface of the semiconductor substrate, so that a side surface of the opaque resin layer forms a side surface of each semiconductor chip; and
conductive bumps connected to the through electrodes.
10. The semiconductor package according to claim 9 , wherein the entire side surface of the opaque resin layer has a uniform height.
11. The semiconductor package according to claim 9 , further comprising a metal solder disposed between a first one of the semiconductor chips and a second one of the semiconductor chips that is disposed directly under the first semiconductor chip, and wherein:
each conductive bump of the first semiconductor chip penetrates the opaque resin layer in a thickness direction of the opaque resin layer, one end of the bump being connected to the through electrode of the first semiconductor chip, the other end of the bump being connected to a metal solder, the metal solder being connected to the through electrode of the second semiconductor chip.