Methods of forming electromigration and thermal gradient based fuse structures
View Patent ↗Methods of forming a microelectronic structure are described. Embodiments of those methods include forming a metallic fuse structure by forming at least one via on a first interconnect structure, lining the at least one via with a barrier layer, and then forming a second interconnect structure on the at least one via.
1. A metallic fuse comprising:
a first surface of at least one via disposed on a first interconnect structure, wherein the at least one via comprises a barrier layer lining, and wherein the barrier layer lining is not disposed on the first interconnect structure adjacent the first surface of the at least one via;
a second interconnect structure disposed on a second surfaceof the at least one via, wherein the barrier lined via is disposed between the first and second interconnect structures, and wherein themetallic fuse structure comprises the barrier lined via disposed between the first and second interconnect structures; and
wherein at least one void is capable of forming within the first interconnect structure and the at least one via, upon application of a current to the metallic fuse.
2. The structure of claim 1 wherein the barrier layer lining comprises at least one of tantalum nitride, tantalum, titanium nitride and titanium, and wherein the barrier layer lining is disposed on the sidewalls and a bottom surface of the at least one via.
3. The structure of claim 1 wherein the metallic fuse comprises at least one of copper and aluminum, and wherein the metallic fuse is substantially free of silicide.
4. The structure of claim 1 wherein a width of the second interconnect structure is at least about 1.5 times wider than a width of the first interconnect structure.
5. The structure of claim 1 wherein a length of the at least one via is less than about 10 microns, and wherein the via comprises copper.
6. The structure of claim 1 wherein the first surface of the at least one via is attached to a first portion of the first interconnect structure and the second surface of the at least one via is attached to a first portion of the second interconnectstructure.
7. The structure of claim 1 further comprising:
a current source that is adapted to supply a sufficient amount ofcurrent to initiate forming at least one void in the metallic fuse;
a bus communicatively coupled to the metallic fuse; and
a DRAM communicatively coupled to the bus.