CMOS image sensor and method for manufacturing the same
View Patent ↗Provided is a CMOS image sensor. The CMOS image sensor can include a semiconductor substrate, a blue photodiode region, a red photodiode region, a green photodiode region, an overcoat layer, and microlenses. The substrate can have a first photodiode region, a second photodiode region, and a transistor region. The blue photodiode region is formed having a predetermined depth in the first photodiode region. The red photodiode region is formed in the first photodiode region having a depth greater than that of the blue photodiode region with a gap separating the red photodiode region from the blue photodiode region. The green photodiode region is formed in the second photodiode region having a depth between the depths of the blue and red photodiode regions. The overcoat layer is formed on the semiconductor substrate, and microlenses are formed on the overcoat layer to correspond to the first and second photodiode regions.
1. A complementary metal oxide semiconductor (CMOS) image sensor, comprising:
a semiconductor substrate having a first photodiode region, a second photodiode region, and a transistor region;
a blue photodiode region formed having a predetermined depth in the first photodiode region;
a red photodiode region formed having a depth greater than that of the blue photodiode region in the first photodiode region, wherein a predetermined gap separates the red photodiode region from the blue photodiode region;
a green photodiode region formed in the second photodiode region to a depth between the depth of the blue photodiode region and the depth of the red photodiode region;
an overcoat layer formed on an entire surface of the semiconductor substrate; and
microlenses formed on the overcoat layer corresponding to the first and second photodiode regions.
2. The CMOS image sensor according to claim 1 , wherein the blue photodiode region has a depth of 0.3-0.5 μm.
3. The CMOS image sensor according to claim 1 , wherein the red photodiode region has a depth of 4-5 μm.
4. The CMOS image sensor according to claim 1 , wherein the green photodiode region has a depth of 1.5-3.0 μm.
5. The CMOS image sensor according to claim 1 , further comprising an impurity region having a conductivity type opposite to that of the blue photodiode region, and formed in a surface of the semiconductor substrate in which the blue photodiode region is formed.
6. The CMOS image sensor according to claim 5 , wherein the impurity region has a depth of 0.1 μm or less.
7. The CMOS image sensor according to claim 1 , wherein the green photodiode region is formed 0.5-1.0 μm from a surface of the semiconductor substrate.