Method of making a bipolar junction transistor
View Patent ↗Embodiments relate to a bipolar junction transistor and a method for manufacturing the same. An oxide pattern may be formed on a P type semiconductor substrate. A low-density N type collector area may be formed in the semiconductor substrate. First spacers may be formed at sidewalls of the oxide pattern, and a low-density P type base area may be formed in the semiconductor substrate. Second spacers may be formed on sidewalls of the first spacers. A high-density N type emitter area may be formed in the low-density P type base area between the second spacers, and a high-density N type collector area may be formed in the semiconductor substrate at an outside of the first spacers. The bipolar junction transistor may be realized through a self-aligned scheme using dual nitride spacers. A base width between the emitter area and the low-density collector area may be narrowed by the width of the second spacer.
1. A method comprising:
forming an oxide pattern over a P type semiconductor substrate;
forming a low-density N type collector area in the semiconductor substrate by performing an ion implantation process using the oxide pattern as a mask;
forming first spacers at sidewalls of the oxide pattern;
forming a low-density P type base area in the semiconductor substrate by performing an ion implantation process using the first spacers as a mask;
forming second spacers on sidewalls of the first spacers;
removing the oxide layer pattern; and
forming a high-density N type emitter area in the low-density P type base area between the second spacers and forming a high-density N type collector area in the semiconductor substrate at an outside of the first spacers, by performing an ion implantation process using the first and second spacers as a mask.
2. The method of claim 1 , wherein the first and second spacers comprise nitride layers.
3. The method of claim 1 , further comprising forming a high-density P type base area in a prescribed area of the semiconductor substrate, which is separated from the high-density N type collector area by a prescribed interval.
4. The method of claim 3 , wherein a width of a low-density P type base in a region between the high-density N type emitter area and the low-density N type collector area is formed to be substantially identical to a width of a lower portion of one of the second spacers.
5. The method of claim 4 , wherein a width of the low-density N type collector is formed to be substantially identical to a width of a lower portion of one of the first spacers.
6. The method of claim 3 , wherein the high-density N type emitter area is formed in the low-density P type base area between inner edges of the second spacers.
7. The method of claim 3 , wherein a depth of the low-density N type collector area is formed to be less than a depth of the low-density P type base area.
8. The method of claim 3 , wherein a depth of the high-density N type emitter area is formed to be less than a depth of the low-density P type base area.
9. The method of claim 3 , wherein a depth of the low-density N type collector area is less than a depth of the low-density P type base area, and a depth of the high-density N type emitter area is less than the depth of the low-density P type base area.