Transistor device and method for manufacturing the same
View Patent ↗A transistor device includes a recess in a surface of semiconductor substrate, a gate insulation layer formed over an inner side of the recess, a gate conductor filling the recess in which the gate insulation layer is formed, and source and drain regions located over the substrate adjacent the recess. Among the advantages: the gate structure lowers overall gate resistance and reduces the short channel effect.
1. A method for fabricating a transistor comprising:
forming a first insulation layer and a second insulation layer over a semiconductor substrate;
selectively etching the first and second insulation layers and semiconductor substrate to form a recess;
depositing a gate insulation layer and a gate conductor layer;
planarizing the gate insulation layer and the gate conductor layer to form a gate structure filling the recess;
removing the second insulation layer;
forming a spacer over a side wall of the gate;
implanting ions into the semiconductor substrate near the spacer to form source and drain regions;
wet etching the first insulation layer and the gate insulation layer to expose an upper side wall of the gate and upper portions of the source and drain regions; and
forming a salicide layer on the exposed surface of the gate and over the source and drain regions.
2. A method according to claim 1 , wherein the planarizing comprises chemical mechanical polishing (CMP) of the gate conductor using the second insulation layer as a polishing stop layer.
3. A method according to claim 1 , wherein the LDD and the source and drain ion implantation profile is formed by ion implantation using a mask once in the source and drain regions.
4. A method according to claim 1 , wherein the gate conductor includes polysilicon.
5. A method according to claim 1 , wherein the gate insulation layer includes one selected from the group consisting of nitride-based oxide, hafnium-based oxide, tantalum-based oxide, and titanium-based oxide.
6. A method according to claim 1 , wherein the recess is etched to a depth of 500 Å to 2000 Å.
7. A method according to claim 1 , wherein said wet etching the first insulation layer leaves a portion of the first insulation layer which is over the source and drain regions, adjacent the gate insulation layer and below the spacer.
8. A method according to claim 7 , wherein said the spacer entirely covers and extends beyond a top surface of said portion of the second insulation layer.