Tunnel-type magnetic detecting element and method of manufacturing the same
A tunnel-type magnetic detecting element is provided. The tunnel-type magnetic detecting element includes a first ferromagnetic layer; an insulating barrier layer; and a second ferromagnetic layer. The first ferromagnetic layer, the second ferromagnetic layer, or both have a Heusler alloy layer contacting the insulating barrier layer. Equivalent planes represented by {110} surfaces, are preferentially oriented parallel to a film surface in the Heusler alloy layer. The insulating barrier layer is formed of MgO and the equivalent crystal planes represented by the {100} surfaces or the equivalent crystal planes represented by the {110} surfaces are oriented parallel to the film surface.
1. A tunnel-type magnetic detecting element comprising:
a first ferromagnetic layer;
an insulating barrier layer; and
a second ferromagnetic layer,
wherein the first ferromagnetic layer, the second ferromagnetic layer, or both have a Heusler alloy layer contacting the insulating barrier layer, and equivalent planes represented by {110} surfaces, are preferentially oriented parallel to a film surface in the Heusler alloy layer, and
wherein the insulating barrier layer is formed of MgO and the equivalent crystal planes represented by the {100} surfaces are oriented parallel to the film surface.
2. The tunnel-type magnetic detecting element according to claim 1 , wherein the equivalent crystal planes represented by the {100} surfaces are preferentially oriented parallel to the film surface in the insulating barrier layer.
3. The tunnel-type magnetic detecting element according to claim 1 ,
wherein the first ferromagnetic layer is a fixed magnetic layer, which is fixed in magnetization and the second ferromagnetic layer is a free magnetic layer, which is variable in magnetization by an external magnetic field, and
wherein the first ferromagnetic layer comprises the Heusler alloy layer.
4. The tunnel-type magnetic detecting element according to claim 1 , wherein the Heusler alloy layer is formed of a metal compound having a Heusler-type crystal structure.
5. The tunnel-type magnetic detecting element according to claim 4 , wherein the Heusler alloy layer is formed of the metal compound represented by the composition formula of X 2 YZ.