Apparatus and method for electrical detection and localization of shorts in metal interconnect lines
View Patent ↗A test structure for localizing shorts in an integrated circuit and method of testing is described. A first comb structure is formed from a first busbar and a first plurality of fingers extending from the first busbar. A second comb structure formed from a second busbar and a second plurality of fingers extending from the second busbar. The second plurality of fingers is interleaved with the first plurality of fingers. A plurality of pass gates is connected between the first plurality of fingers and the first busbar. A pass gate terminal is electrically connected to the gate electrode of each of the plurality of pass gates. When the pass gates are turned OFF thereby disconnecting the first busbar from the first plurality of fingers, voltage contrast imaging can be used to identify which of the first fingers is adjacent the short.
1. A method for testing a test structure for an electrical short, the method comprising:
testing a comb pair for electrical continuity, the comb pair comprising a first comb-shaped structure having a first busbar and a first plurality of fingers extending form the first busbar and a second comb-shaped structure having a second busbar and a second plurality of fingers extending from the second busbar, the first plurality of fingers being interleaved with the second plurality of fingers, the testing determining whether a short exists between the first comb-shaped structure and the second comb-shaped structure while the first plurality of fingers are electrically connected to the first busbar and the second plurality of fingers are electrically connected to the second busbar;
localizing the short by electrically disconnecting the first plurality of fingers from the first busbar and imaging the test structure using voltage contrast to identify which of the first plurality of fingers is placed at the same voltage as the second comb-shaped structure as a result of the short.
2. The method of claim 1 , wherein first plurality of fingers are electrically disconnected from the first busbar by changing a voltage applied to a pass gate terminal, the pass gate terminal being electrically connected to a gate electrode of a plurality of pass gates, the plurality of pass gates being electrically interposed between the first busbar and the first plurality of fingers.
3. The method of claim 2 wherein each of the plurality of pass gates comprises a transistor.
4. The method of claim 1 , further comprising:
prior to the imaging of the test structure using voltage contrast, reviewing known defects identified by an inspection tool during manufacture of the test structure to determine if one of the known defects causes the short; and
proceeding with the imaging of the test structure when none of the known defects cause the short.
5. The method of claim 1 , further comprising:
further localizing the short by electrically connecting the first plurality of fingers to the first busbar and electrically disconnecting the second plurality of fingers from the second busbar, and imaging the test structure using voltage contrast to identify which of the second plurality of fingers is placed at the same voltage as the first comb-shaped structure as a result of the short.
6. The method of claim 1 , further comprising:
further localizing the short by segmenting each of the first plurality of fingers and each of the second plurality of fingers into a first plurality of finger segments adjacent the first busbar and a second plurality of finger segments adjacent the second busbar, and selectively electrically disconnecting one of the first and second pluralities of finger segments to determine whether the short is adjacent to the first plurality of finger segments or the second plurality of finger segments.
7. The method of claim 6 , wherein the first plurality of fingers and the second plurality of fingers are further segmented into additional finger segments, the method further comprising selectively electrically disconnecting the additional finger segments to further localize the short.
8. The method of claim 1 , wherein the second busbar further is coupled to a third plurality of fingers and wherein said third plurality of fingers are interleaved with a fourth plurality of fingers coupled to a third busbar wherein said fourth plurality of fingers is operable to be decoupled from said third busbar.