Circuit structure with low dielectric constant regions and method of forming same
View Patent ↗A method for manufacturing a circuit includes the step of providing a first wiring level comprising first wiring level conductors separated by a first wiring level dielectric material. A first dielectric layer with a plurality of interconnect openings and a plurality of gap openings is formed above the first wiring level. The interconnect openings and the gap openings are pinched off with a pinching dielectric material to form relatively low dielectric constant (low-k) volumes in the gap openings. Metallic conductors comprising second wiring level conductors and interconnects to the first wiring level conductors are formed at the interconnect openings while maintaining the relatively low-k volumes in the gap openings. The gap openings with the relatively low-k volumes reduce parasitic capacitance between adjacent conductor structures formed by the conductors and interconnects.
1. A method of manufacturing a circuit, comprising the steps of:
providing a first wiring level comprising first wiring level conductors separated by a first wiring level dielectric material;
forming a first dielectric layer of first dielectric layer material above said first wiring level, said first dielectric layer having a plurality of interconnect openings and a plurality of gap openings;
pinching off said interconnect openings and said gap openings with a pinching dielectric material to form relatively low dielectric constant (low-k) volumes in said gap openings; and
forming:
metallic conductors comprising second wiring level conductors, and interconnects
at said interconnect openings while maintaining said relatively low-k volumes in said gap openings, said first wiring level conductors, said second wiring level conductors, and said interconnects forming a series of conductor structures, said gap openings with said relatively low-k volumes reducing parasitic capacitance between adjacent ones of said conductor structures as compared to an otherwise comparable circuit not including said gap openings with said relatively low-k volumes.
2. The method of claim 1 , wherein said relatively low-k volumes have a dielectric constant of from about 1 to about 1.1.
3. The method of claim 1 , further comprising the additional step of forming a capping layer over said first wiring level prior to forming said first dielectric layer.
4. The method of claim 1 , further comprising the additional step of forming a capping layer over said first dielectric level.
5. The method of claim 1 , wherein said pinching off step comprises inorganic chemical vapor deposition (CVD).
6. The method of claim 1 , wherein:
said pinching off step results in a pinched-off structure; and
said step of forming said second wiring level conductors and said interconnects comprises:
employing trench lithography to form a layer substantially resistant to etching over said pinched-off structure, said etching-resistant layer having gaps over said interconnect openings;
etching trenches at said interconnect openings to form an etched structure; and
metallizing said etched structure to produce a metallized etched structure comprising said second wiring level conductors and said interconnects.
7. The method of claim 6 , wherein said metallizing comprises plating.
8. The method of claim 6 , wherein said step of forming said second wiring level conductors further comprises planarizing said metallized etched structure so as to reduce a thickness of said second wiring level conductors.
9. The method of claim 8 , wherein said planarizing comprises chemical-mechanical polishing (CMP).
10. The method of claim 1 , wherein said step of forming said first dielectric layer above said first wiring level comprises forming said plurality of interconnect openings and said plurality of gap openings substantially simultaneously.
11. The method of claim 10 , wherein said forming of said plurality of interconnect openings and said plurality of gap openings is conducted by patterning and etching said first dielectric layer.
12. The method of claim 1 , wherein said pinching dielectric material comprises an inorganic dielectric.
13. The method of claim 12 , wherein said inorganic dielectric comprises a compound of at least one of silicon, oxygen, carbon, hydrogen, nitrogen, boron, and sulfur.
14. The method of claim 1 , wherein said pinching dielectric material comprises an organic dielectric.
15. The method of claim 14 , wherein said organic dielectric comprises one of polyparylene ether, diamond-like carbon, and a spin-coated organic dielectric.
16. The method of claim 1 , wherein said second dielectric material and said pinching dielectric material are different.
17. The method of claim 1 , wherein said interconnect openings have a polygonal cross-section.
18. The method of claim 17 , wherein said interconnect openings comprise via interconnect openings having a generally circular cross-section.
19. The method of claim 1 , wherein said gap openings have a polygonal cross-section.