Semiconductor devices
The semiconductor device has a collector electrode, a p + collector region formed on the collector electrode, an n − drift region formed on the collector region, a p − body region formed on the drift region, and a plurality of n + emitter regions formed within the body region. The emitter regions are connected to an emitter electrode. A plurality of trench gate electrodes is formed within the body region. Each trench gate electrode opposes, via an insulating layer, a portion of the body region separating the drift region and the emitter region. The body region is divided into a plurality of body sections, and the body sections are classified into two groups. One group has the emitter region within the body section, and the other group has no emitter region within the body section. A plurality of first trenches is formed within the body section having no emitter region. A p + contact region is formed between the first trench and the trench gate electrode.
1. A semiconductor device comprising:
a collector electrode;
a collector region having a first conductivity type and connected to the collector electrode;
a drift region having a second conductivity type and connected to the collector region;
a body region having the first conductivity type and separated from the collector region by the drift region;
a plurality of emitter regions, each emitter region having the second conductivity type and being separated from the drift region by the body region;
an emitter electrode connected to the emitter regions;
a plurality of trench gate electrodes, each trench gate electrode opposing, via an insulating layer, a portion of the body region separating the drift region and the emitter region, the body region being divided into a plurality of body sections by the plurality of trench gate electrodes, and the body sections being classified into two groups, wherein one group has the emitter region within the body section, and the other group has no emitter region within the body section;
a plurality of first trenches formed within each of the body sections having no emitter region;
a peripheral body contact region having the first conductivity type and surrounding the emitter regions and the trench gate electrodes,a peripheral region surrounding the peripheral body contact region; and
a contact region having the first conductivity type, being formed between the trench gate electrode and the first trench adjacent to the trench gate electrode, not being formed between the first trenches, and being connected to the emitter electrode;
wherein a portion of the body section located between the first trenches is electrically connected to the emitter electrode via the contact region.
2. The semiconductor device according to claim 1 , wherein the first trenches are made of an insulator or of a conductor covered with an insulator.
3. The semiconductor device according 2 , wherein the conductor provided within the first trenches are connected to the emitter electrode.
4. The semiconductor device according to claim 1 , wherein each of the first trenches extends longitudinally, a slit is formed in each of the first trenches, and there is electrical conduction, by means of the slits, between the body sections located at both sides of the first trench.
5. The semiconductor device according to claim 4 , wherein the locations of the slits in adjacent first trenches mutually differ, in a longitudinal direction of the first trench.
6. The semiconductor device according to claim 1 , wherein each of the trench gate electrodes extends longitudinally, and each of the first trenches extends in a direction that has elements of the longitudinal direction of the trench gate electrodes and the direction orthogonal thereto.
7. The semiconductor device according to claim 1 , wherein each of the trench gate electrodes extends longitudinally, and each of the first trenches also extends, wherein a longitudinal direction of the first trenches is orthogonal to the longitudinal direction of the trench gate electrodes.
8. The semiconductor device according to claim 1 , wherein each of the trench gate electrodes extends longitudinally, and the plurality of first trenches is repeated in the longitudinal direction of the trench gate electrodes.