Method and device for encapsulating electronic components with a conditioning gas
The invention relates to a method for encapsulating electronic components in a mold by the processing steps of: A) placing the electronic component for encapsulating in a mold cavity, and B) feeding an encapsulating material to the mold cavity, wherein at least a part of the mold surface defining the mold cavity is brought into contact with a conditioning gas containing a decreased oxygen concentration relative to the atmosphere. The invention also relates to a device for encapsulating an electronic component, in particular a semiconductor, with encapsulating material.
1. A method of encapsulating electronic components in a mould comprising:
(a) placing an electronic component for encapsulating in a mould cavity of a mould comprised of plural mould parts;
(b) following step (a), feeding an encapsulating material to the mould cavity;
(c) following step (b), releasing the encapsulating material by moving the mould parts apart over a limited distance to form a supply channel; and
(d) following step (c), feeding conditioning gas having a decreased oxygen concentration relative to the atmosphere to a contact side of the mould via the supply channel formed in step (c), whereupon a releasing gas pressure is exerted on the encapsulating material by the conditioning gas which causes release of the encapsulating material from the mould absent mechanically engaging the encapsulating material and which simultaneously conditions the mould cavity to limit adhesion between the encapsulating material and the mould cavity.
2. The method as claimed in claim 1 , further including, prior to step (c), at least partial curing the encapsulating material in the mould cavity.
3. The method as claimed in claim 1 , wherein a flow of the conditioning gas is guided along at least the contact side of a surface defining the mould cavity.
4. The method as claimed in claim 1 , wherein the conditioning gas is an inert gas.
5. The method as claimed in claim 4 , wherein the inert gas is nitrogen.
6. The method as claimed in claim 1 , wherein the conditioning gas is a reducing gas.
7. The method as claimed in claim 1 , wherein the mould parts moved apart in step (c) include a support of the electronic component and an edge part of the mould.
8. The method as claimed in claim 1 , wherein the releasing gas pressure is developed between the contact side of the mould and a side of the encapsulated electronic component directed toward the contact side of the mould.
9. The method as claimed in claim 1 , wherein step (d) includes a side of the encapsulated electronic component directed toward a shape-defining surface of one of the mould parts being released as a wave front from said shape-defining surface.
10. The method as claimed in claim 1 , wherein the releasing gas pressure is produced by a heated gas.
11. The method as claimed in claim 1 , wherein the releasing gas pressure is reduced after full release of a side of the encapsulated electronic component directed toward a mould part.