Method for manufacturing flash memory device
View Patent ↗A method for manufacturing a flash memory device including the steps of forming a gate oxide film for high voltage on the whole surface of a semiconductor substrate on which a cell region, a low voltage region and a high voltage region have been formed, etching the gate oxide film for high voltage formed in the cell region and the low voltage region by a predetermined depth, by forming photoresist patterns to expose the gate oxide film for high voltage formed in the cell region and the low voltage region, and performing a wet etching process using the photoresist patterns as an etching mask, removing the entire gate oxide film for high voltage formed in the cell region and the low voltage region, by performing a cleaning process on the resulting structure, removing the photoresist patterns, forming a floating gate electrode and a control gate electrode, by sequentially forming a tunnel oxide film, a first polysilicon film, a second polysilicon film, a dielectric film, a third polysilicon film and a metal silicide film on the whole surface of the resulting structure, and patterning the resulting structure, and forming source and drain regions, by implanting ions by using the gate electrodes as an ion implant mask.
1. A method for manufacturing a flash memory device, the method comprising:
forming a first gate insulating layer over a semiconductor substrate on which a cell region, a low voltage region, and a high voltage region have been formed;
partially removing the first gate insulating layer in the low voltage region and the cell region by performing a first process;
removing the remaining first gate insulating layer in the low voltage region and the cell region by performing a second process; and
forming a second gate insulating layer over the first gate insulating layer in the high voltage region and over the semiconductor substrate in the cell region and low voltage region.
2. The method of claim 1 , wherein the first process comprises a wet etching process and the second process comprises a cleaning process.
3. The method of claim 1 , comprising removing the first gate insulating layer using a photoresist pattern as a mask.
4. The method of claim 1 , comprising forming the first gate insulating layer at a thickness of 300 Å to 400 Å, by performing a wet oxidation process at a temperature of 750° C. to 800° C. and an N 2 annealing process at a temperature of 900° C. to 910° C. for 20 minutes to 30 minutes.
5. The method of claim 1 , wherein the thickness of the remaining first insulating layer is about 15 Å to 45 Å.
6. The method of claim 2 , comprising performing the wet etching process by using an etching solution comprising BOE, H 2 SO 4 ,and SC-1(NH 4 OH/H 2 O 2 /H 2 O).
7. The method of claim 2 , comprising performing the cleaning process using DHF and SC-1(NH 4 OH/H 2 O 2 /H 2 O).
8. The method of claim 1 , comprising forming the second gate insulating layer at a thickness of 70 Å to 100 Å, by forming a pure oxide film at a thickness of 60 Å to 90 Å by performing a wet oxidation process at a temperature of 750° C. to 800° C. and an N 2 annealing process at a temperature of about to about for 20 minutes to 30 minutes.
9. The method of claim 8 , wherein the forming the second gate insulating layer further includes performing a nitridation process using N 2 O gas annealing at a temperature of 800° C. to 1000° C. for 10 minutes to 30 minutes after the N 2 annealing process.
10. The method of claim 1 , further includes:
forming a isolation structure in the semiconductor substrate; and
forming a gate structure formed with a floating gate, a dielectric layer and a control gate.
11. The method of claim 1 , comprising forming the first gate insulating layer by a wet oxidation process.