Vertical gallium-nitride based light emitting diode
View Patent ↗A vertical GaN-based LED and a method of manufacturing the same are provided. The vertical GaN-based LED can prevent the damage of an n-type GaN layer contacting an n-type electrode, thereby stably securing the contact resistance of the n-electrode. The vertical GaN-based LED includes: a support layer; a p-electrode formed on the support layer; a p-type GaN layer formed on the p-electrode; an active layer formed on the p-type GaN layer; an n-type GaN layer for an n-type electrode contact, formed on the active layer; an etch stop layer formed on the n-type GaN layer to expose a portion of the n-type GaN layer; and an n-electrode formed on the n-type GaN layer exposed by the etch stop layer.
1. A vertical gallium-nitride (GaN)-based light emitting diode (LED) comprising:
a support layer;
a p-electrode formed on the support layer;
a p-type GaN layer formed on the p-electrode;
an active layer formed on the p-type GaN layer;
an n-type GaN layer for an n-type electrode contact, formed on the active layer;
an etch stop layer formed on the n-type GaN layer to expose a portion of the n-type GaN layer; and
an n-electrode formed on the n-type GaN layer exposed by the etch stop layer.
2. The vertical GaN-based LED according to claim 1 ,
wherein the etch stop layer is formed of material having an etching selectivity different from that of the n-type GaN layer.
3. The vertical GaN-based LED according to claim 2 ,
wherein the etch stop layer is formed of at least one material selected from the group consisting of group III-V semiconductor compounds, group III-VI semiconductor compounds, and group III-VII semiconductor compounds.
4. The vertical GaN-based LED according to claim 1 ,
wherein the etch stop layer has an uneven surface.
5. The vertical GaN-based LED according to claim 1 , further comprising:
an n-type transparent electrode and an n-type reflective electrode sequentially formed between the n-type GaN layer including the etch stop layer and the n-electrode.