High voltage semiconductor device and method for fabricating the same
View Patent ↗There is provided a high voltage semiconductor device comprising: a semiconductor substrate of a first conductivity type, including a first region, a second region relatively lower than the first region, and a sloped region between the first region and the second region; a drift region of a second conductivity type, formed on the second region; a source region of the second conductivity type, disposed on the first region, and spaced apart from the drift region by the sloped region; a drain region of the second conductivity type, disposed on the drift region; a field plate positioned on the drift region in the second region; a gate insulating layer disposed between the source region and the drift region; and a gate electrode layer, which is disposed on the gate insulating layer and extends to above the field plate.
1. A high voltage semiconductor device comprising:
a semiconductor substrate of a first conductivity type, including a first region, a second region relatively lower than the first region, and a sloped region between the first region and the second region;
a drift region of a second conductivity type, formed in the second region;
a source region of the second conductivity type, formed in the first region and spaced apart from the drift region by the sloped region;
a drain region of the second conductivity type, formed on the drift region;
a field plate formed on the drift region in the second region;
a gate insulating layer formed on the semiconductor substrate between the source region and the drift region; and
a gate electrode layer, which is disposed on the gate insulating layer and extends above the field plate.
2. The high voltage semiconductor device of claim 1 , wherein the first conductivity type is p-type, and the second conductivity type is n-type.
3. A method for fabricating a high voltage semiconductor device, comprising:
forming a drift region of a second conductivity type, on a predetermined region of a semiconductor substrate of a first conductivity type;
forming a local oxidation of silicon (LOCOS) field plate on a surface of the semiconductor substrate which is in contact with the drift region;
exposing a sloped portion of the semiconductor substrate by patterning the field plate such that the drift region is placed adjacent to a lower side of the sloped portion;
forming a gate conductive layer pattern above the exposed sloped portion of the semiconductor substrate, and forming a gate insulating layer between the gate conductive layer pattern and the semiconductor substrate; and
forming a source region adjacent to an upper side of the sloped portion and a drain region respectively on the semiconductor substrate and the drift region.
4. The method of claim 3 , wherein the gate conductive layer pattern is formed to extend to above the field plate.
5. The method of claim 3 , wherein the first conductivity type is p-type, and the second conductivity type is n-type.
6. The high voltage semiconductor of claim 1 , wherein a current passes below the field plate in a horizontal direction without detouring around the field plate.