Horn, horn unit, and bonding apparatus using same
A horn that can suppress oscillation components other than the component in the horizontal direction, a horn unit, and a bonding apparatus using same are provided. The horn has a cross-section variable section in which a cross section perpendicular to the lengthwise direction (X direction) thereof has a first region extending in the Z direction and a pair of second regions sandwiching the first region from Y direction. In the position P 3 corresponding to an anti-node of a standing wave of oscillations excited in the horn, a sectional area S 1 of the first region assumes a maximum and a sectional area S 2 of the second region assumes a minimum. With a transition from the position P 3 to the other positions corresponding to nodes, the sectional area S 1 decreases and the sectional area S 2 increases. As a result, oscillation components other than those in the X direction are suppressed.
1. A horn to which oscillations are applied by an oscillator, comprising:
a portion in which a cross section perpendicular to a lengthwise direction of said horn has:
a first region extending in a first direction perpendicular to the lengthwise direction; and
a pair of second regions sandwiching the first region in a second direction perpendicular to the first direction and the lengthwise direction,
wherein a sectional area of the first region has a maximum displacement in the first direction and a sectional area of the second region has a minimum displacement in the first direction at a first position of the horn, the first position corresponding to an anti-node of a standing wave of oscillations excited in the horn, and
wherein a transition of the sectional area of the first region decreases in the first direction from the first position to a second position along the lengthwise direction, and a transition of the sectional area of the second region in the first direction increases from the first position to the second position along the lengthwise direction, the second position corresponding to a node of the standing wave.
2. The horn according to claim 1 , wherein the first region narrows in the first direction, whereby the sectional area of the first region decreases, and the second region expands in the first direction, whereby the sectional area of the second region increases.
3. A horn unit comprising:
a horn, to which oscillations are applied by an oscillator, comprising
a portion in which a cross section perpendicular to a lengthwise direction of the horn has a first region extending in a first direction perpendicular to the lengthwise direction and a pair of second regions sandwiching the first region in a second direction perpendicular to the first direction and the lengthwise direction,
wherein a sectional area of the first region has a maximum displacement in the first direction and a sectional area of the second region has a minimum displacement in the first direction at a first position of the horn, the first position corresponding to an anti-node of a standing wave of oscillations excited in the horn, and
wherein a transition of the sectional area of the first region decreases in the first direction from the first position to a second position along the lengthwise direction, and a transition of the sectional area of the second region increases in the first direction from the first position to the second position along the lengthwise direction, the second position corresponding to a node of the standing wave; and
a horn holder joined to the horn in the second position.
4. A bonding apparatus comprising:
an oscillator for applying oscillations to a horn;
a horn unit comprising said horn, to which oscillations are applied by said oscillator, comprising a portion in which a cross section perpendicular to a lengthwise direction of said horn has
a first region extending in a first direction perpendicular to the lengthwise direction; and a pair of second regions sandwiching said first region in a second direction perpendicular to said first direction and the lengthwise direction,
wherein a sectional area of the first region assumes a maximum displacement in the first direction and a sectional area of the second region assumes minimum displacement in the first direction at a first position of the horn, the first position corresponding to an anti-node of a standing wave of oscillations excited in the horn, and
wherein a transition of the sectional area of the first region decreases in the first direction from the first position to a second position along the lengthwise direction, and a transition of the sectional area increases in the first direction, from the first position to the second position along the lengthwise direction, the second position corresponding to a node of the standing wave, and
a horn holder joined to the horn in the second position; and
pressurization means for performing pressurization control in the first direction.