IP Library Granted Patent US 8,097,877
Granted Patent B2
US 8,097,877 · App. 11/642,217 · Granted Jan 17, 2012

Inorganic-organic hybrid thin-film transistors using inorganic semiconducting films

Assignee: Northwestern University
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Quick Facts
Patent No.
US 8,097,877
App. No.
11/642,217
Granted
Jan 17, 2012
Kind
B2
Abstract

Inorganic semiconducting compounds, composites and compositions thereof, and related device structures.

Claims (20)

1. A thin film transistor device comprising an inorganic-organic hybrid thin film composition, the inorganic-organic hybrid thin film composition comprising an inorganic semiconductor component deposited directly on and contacting an organic dielectric component, wherein the inorganic semiconductor component comprises a metal oxide comprising indium.

2. The device of claim 1 , wherein the inorganic semiconductor component is In 2 O 3 .

3. The device of claim 1 , wherein the organic dielectric component comprises a dielectric polymer.

4. The device of claim 3 , wherein the dielectric polymer is selected from poly(vinylphenol), polystyrene, and copolymers thereof.

5. The device of claim 1 , wherein the organic dielectric component comprises a multi-layered composition, the multi-layered composition comprising periodically alternating layers, the periodically alternating layers comprising one or more layers comprising a silyl moiety, and one or more layers comprising a π-polarizable moiety.

6. The device of claim 5 , wherein at least some of the periodically alternating layers are coupled to an adjacent layer by a coupling layer comprising a siloxane matrix.

7. The device of claim 1 , wherein the inorganic-organic hybrid thin film composition is coupled to a substantially transparent substrate.

8. The device of claim 1 , wherein the organic dielectric component is coupled to a gate substrate, and the inorganic semiconductor component is an n-channel layer deposited directly on and contacting the organic dielectric component.

9. The device of claim 1 , wherein the device is a transparent thin film transistor.

10. A thin film transistor device comprising an inorganic-organic hybrid thin film composition, the inorganic-organic hybrid thin film composition comprising an inorganic semiconductor component deposited directly on and contacting an organic dielectric component, wherein the organic dielectric component comprises a polymeric component, a π-polarizable component, or a combination thereof; and the inorganic semiconductor component comprises indium in the form of an oxide, a nitride, a phosphide, an arsenide, or a chalcogenide.

11. The device of claim 10 , wherein the inorganic semiconductor component is In 2 O 3 .

12. The device of claim 10 , wherein the π-polarizable component is coupled to at least one of a silyl moiety and a siloxane moiety.

13. The device of claim 10 , wherein the π-polarizable component comprises a non-linear optical chromophore.

14. The device of claim 10 , wherein the inorganic-organic hybrid thin film composition is coupled to a substrate selected from glass, silicon, an indium oxide material, and a flexible plastic material.

15. A thin film transistor device comprising an inorganic-organic hybrid thin film composition, the inorganic-organic hybrid thin film composition comprising an inorganic semiconductor component deposited directly on and contacting to an organic dielectric component, wherein the organic dielectric component comprises a polymeric component, a π-polarizable component, or a combination thereof; and the inorganic semiconductor component comprises a metal oxide comprising indium.

16. The device of claim 15 , wherein the inorganic semiconductor component is derived from a metal oxide target comprising indium.

17. The device of claim 16 , wherein the inorganic semiconductor component comprises a room temperature ion-assisted deposition product of a metal oxide comprising indium.

18. The device of claim 16 , wherein the inorganic semiconductor component comprises a sputtered metal oxide comprising indium.

19. The device of claim 16 , wherein the organic dielectric component comprises a polymer blend, the polymer blend comprising a polymeric component and a component comprising hydrolyzable moieties.

20. The device of claim 16 , wherein the organic dielectric component comprises a polymer blend, the polymer blend comprising a polymeric component and a component affording substrate sorption, condensation, or intermolecular crosslinking.

Assignments (4)
CONFIRMATORY LICENSE Recorded Dec 22, 2015
From: NORTHWESTERN UNIVERSITY
To: USA AS REPRESENTED BY THE ADMINISTRATOR OF THE NASA
Reel/Frame 037371/0218 →
CONFIRMATORY LICENSE Recorded May 24, 2012
From: NORTHWESTERN UNIVERSITY, TECHNOLOGY TRANSFER PROGRAM
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 028274/0625 →
CONFIRMATORY LICENSE Recorded Jul 3, 2007
From: NORTHWESTERN UNIVERSITY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 019514/0276 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 22, 2007
From: MARKS, TOBIN J.; FACCHETTI, ANTONIO; WANG, LIAN; YOON, MYUNG-HAN; YANG, YU
To: NORTHWESTERN UNIVERSITY
Reel/Frame 019049/0496 →
Continuity (2)
Provisional Application 60752159 · Dec 20, 2005
Related Publication 20080017854A1 · Jan 24, 2008