Narrow width metal oxide semiconductor transistor
View Patent ↗Disclosed is a semiconductor transistor for enhancing performance of PMOS and NMOS transistors, particularly current driving performance, while reducing a narrow width effect. A narrow width MOS transistor includes: a channel of which width is W 0 and length is L 0 ; an active area including source and drain areas formed at both sides with the channel as a center; a gate insulating layer formed on the channel; a gate conductor formed on the gate insulating layer and intersecting the active area; a first additional active area of width is larger than that W 0 of the channel as an active area added to the source area; and a second additional active area of width is larger than that W 0 of the channel as an active area added to the drain area. When the structure of the transistor having the additional active areas is applied to NMOS and PMOS transistors, a driving current is represented as 107.27% and 103.31%, respectively. Accordingly, the driving currents of both PMOS and NMOS transistors are enhanced.
1. A MOS transistor comprising:
a channel having a width W 0 and a length L 0 ;
an active area including source and drain areas at opposite sides of the channel;
a gate insulating layer on the channel;
a gate conductor on the gate insulating layer and intersecting the active area having a contact region that does not intersect the active area, wherein the contact region has a length and width that are both greater than a length of the gate conductor;
a first additional active area having a width larger than W 0 added to the source area; and
a second additional active area having a width larger than W 0 added to the drain area.
2. The MOS transistor of claim 1 , wherein the active area comprises N-type impurities.
3. The MOS transistor of claim 1 , wherein the active area comprises P-type impurities.
4. The MOS transistor of claim 1 , wherein the first and second additional active areas are continuous with the source and drain areas.
5. The MOS transistor of claim 1 , wherein the transistor is a narrow width transistor.
6. The MOS transistor of claim 1 , further comprising one or more contacts on the contact region of the gate conductor.
7. The MOS transistor of claim 1 , wherein the gate conductor comprises a first portion intersecting the active area and a second portion perpendicular to the first portion and not intersecting the active area, the second portion connected at a first end to the first portion and at opposite end to the contact region.
8. The MOS transistor of claim 1 , wherein the first and second additional active areas each have lengths larger than lengths of the source and drain areas.
9. The MOS transistor of claim 1 , wherein the gate conductor has a first end intersecting the channel and an opposite end connected to the contact region of the gate conductor.
10. The MOS transistor of claim 9 , wherein the first and second additional active areas adjacent to a second portion of the gate conductor that does not intersect the channel.
11. The MOS transistor of claim 10 , wherein the source and drain areas each include a contact region therein.
12. The MOS transistor of claim 10 , wherein the second portion of the gate conductor is adjacent to the first and second additional active areas, and the gate conductor does not intersect the first and second additional active areas.
13. The MOS transistor of claim 11 , further comprising one or more contacts on each of the contact regions of the source and drain areas.
14. A MOS transistor, comprising:
a channel having a width W 0 and a length L 0 ;
an active area including source and drain areas at opposite sides of the channel;
a gate insulating layer on the channel;
a gate conductor on the gate insulating layer and intersecting the active area having a contact region that does not intersect the active area, wherein the contact region has a length and width that are both greater than a length of the gate conductor; and
a first additional active area having a width larger than W 0 added to the source or drain area.
15. The MOS transistor of claim 14 , wherein the active area comprises N-type impurities or P-type impurities.
16. The MOS transistor of claim 14 , wherein the first additional active area is continuous with the source area.
17. The MOS transistor of claim 14 , further comprising one or more contacts on the contact region of the gate conductor.
18. The MOS transistor of claim 14 , wherein the gate conductor has a first end intersecting the channel and an opposite end connected to the contact region of the gate conductor.
19. The MOS transistor of claim 18 , wherein the first additional active area is adjacent to a second portion of the gate conductor that does not intersect the channel.
20. The MOS transistor of claim 19 , wherein the second portion of the gate conductor is adjacent to the first additional active area, and the gate conductor does not intersect the first additional active area.